Novel High-Capacitance-Ratio MEMS Switch: Design, Analysis and Performance Verification
This paper proposes a novel high-capacitance-ratio radio frequency micro-electromechanical systems (RF MEMS) switch. The proposed RF MEMS mainly consists of serpentine flexure MEMS metallic beam, comprised of coplanar waveguide (CPW) transmission line, dielectric and metal-insulator-metal (MIM) floa...
Main Authors: | Ke Han, Xubing Guo, Stewart Smith, Zhongliang Deng, Wuyu Li |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2018-08-01
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Series: | Micromachines |
Subjects: | |
Online Access: | http://www.mdpi.com/2072-666X/9/8/390 |
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