The Electromechanical Behavior of a Micro-Ring Driven by Traveling Electrostatic Force
There is no literature mentioning the electromechanical behavior of micro structures driven by traveling electrostatic forces. This article is thus the first to present the dynamics and stabilities of a micro-ring subjected to a traveling electrostatic force. The traveling electrostatic force may be...
Main Authors: | , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2012-01-01
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Series: | Sensors |
Subjects: | |
Online Access: | http://www.mdpi.com/1424-8220/12/2/1170/ |