Statistical Investigation of the Mechanical and Geometrical Properties of Polysilicon Films through On-Chip Tests
In this work, we provide a numerical/experimental investigation of the micromechanics-induced scattered response of a polysilicon on-chip MEMS testing device, whose moving structure is constituted by a slender cantilever supporting a massive perforated plate. The geometry of the cantilever was speci...
Main Authors: | Ramin Mirzazadeh, Aldo Ghisi, Stefano Mariani |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2018-01-01
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Series: | Micromachines |
Subjects: | |
Online Access: | http://www.mdpi.com/2072-666X/9/2/53 |
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