Analysis of micromachined Fabry-Pérot cavities using phase-sensitive optical low coherence interferometry: Insight on dimensional measurements of dielectric layers

Analysis of micromachined Fabry-Pérot cavities using phase-sensitive optical low coherence interferometry: Insight on dimensional measurements of dielectric layers

Herein, we highlight a behavior underlying the physics of Fabry-Pérot micro-cavities with distributed reflectors as there is a need to discriminate between effective and physical cavity lengths. Hence, Phase-Sensitive Optical Low Coherence Interferometry has been implemented to characterize micro-ca...

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Main Authors: M. Malak, A.-F. Obaton, F. Marty, N. Pavy, S. Didelon, P. Basset, T. Bourouina
Format: Article
Language:English
Published: AIP Publishing LLC 2012-06-01
Series:AIP Advances
Online Access:http://dx.doi.org/10.1063/1.4727741
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spelling doaj-9b618682da7043e7b02dbdc70200d9c82020-11-25T02:44:56ZengAIP Publishing LLCAIP Advances2158-32262012-06-0122022143022143-710.1063/1.4727741043202ADVAnalysis of micromachined Fabry-Pérot cavities using phase-sensitive optical low coherence interferometry: Insight on dimensional measurements of dielectric layersM. Malak0A.-F. Obaton1F. Marty2N. Pavy3S. Didelon4P. Basset5T. Bourouina6Université Paris-Est, Laboratoire ESYCOM, ESIEE Paris, Cité Descartes, 2 Boulevard Blaise Pascal, 93162 Noisy-le-Grand Cedex, France(LNE), Laboratoire Commun de Métrologie, 29 avenue R. Hennequin, 78197 Trappes Cedex, FranceUniversité Paris-Est, Laboratoire ESYCOM, ESIEE Paris, Cité Descartes, 2 Boulevard Blaise Pascal, 93162 Noisy-le-Grand Cedex, FranceUniversité Paris-Est, Laboratoire ESYCOM, ESIEE Paris, Cité Descartes, 2 Boulevard Blaise Pascal, 93162 Noisy-le-Grand Cedex, FranceUniversité Paris-Est, Laboratoire ESYCOM, ESIEE Paris, Cité Descartes, 2 Boulevard Blaise Pascal, 93162 Noisy-le-Grand Cedex, FranceUniversité Paris-Est, Laboratoire ESYCOM, ESIEE Paris, Cité Descartes, 2 Boulevard Blaise Pascal, 93162 Noisy-le-Grand Cedex, FranceUniversité Paris-Est, Laboratoire ESYCOM, ESIEE Paris, Cité Descartes, 2 Boulevard Blaise Pascal, 93162 Noisy-le-Grand Cedex, FranceHerein, we highlight a behavior underlying the physics of Fabry-Pérot micro-cavities with distributed reflectors as there is a need to discriminate between effective and physical cavity lengths. Hence, Phase-Sensitive Optical Low Coherence Interferometry has been implemented to characterize micro-cavities with planar or curved reflectors. Beside the retrieved physical length, we obtain valuable information about the reflector thickness and number of layers. The accuracy of the technique has been estimated. Results suggest that this technique might be suitable to retrieve dimensional characteristics of any device constructed from multiple dielectric layers, whose thickness ranges from 2 micrometers up to hundreds of micrometers.http://dx.doi.org/10.1063/1.4727741
collection DOAJ
language English
format Article
sources DOAJ
author M. Malak
A.-F. Obaton
F. Marty
N. Pavy
S. Didelon
P. Basset
T. Bourouina
spellingShingle M. Malak
A.-F. Obaton
F. Marty
N. Pavy
S. Didelon
P. Basset
T. Bourouina
Analysis of micromachined Fabry-Pérot cavities using phase-sensitive optical low coherence interferometry: Insight on dimensional measurements of dielectric layers
AIP Advances
author_facet M. Malak
A.-F. Obaton
F. Marty
N. Pavy
S. Didelon
P. Basset
T. Bourouina
author_sort M. Malak
title Analysis of micromachined Fabry-Pérot cavities using phase-sensitive optical low coherence interferometry: Insight on dimensional measurements of dielectric layers
title_short Analysis of micromachined Fabry-Pérot cavities using phase-sensitive optical low coherence interferometry: Insight on dimensional measurements of dielectric layers
title_full Analysis of micromachined Fabry-Pérot cavities using phase-sensitive optical low coherence interferometry: Insight on dimensional measurements of dielectric layers
title_fullStr Analysis of micromachined Fabry-Pérot cavities using phase-sensitive optical low coherence interferometry: Insight on dimensional measurements of dielectric layers
title_full_unstemmed Analysis of micromachined Fabry-Pérot cavities using phase-sensitive optical low coherence interferometry: Insight on dimensional measurements of dielectric layers
title_sort analysis of micromachined fabry-pérot cavities using phase-sensitive optical low coherence interferometry: insight on dimensional measurements of dielectric layers
publisher AIP Publishing LLC
series AIP Advances
issn 2158-3226
publishDate 2012-06-01
description Herein, we highlight a behavior underlying the physics of Fabry-Pérot micro-cavities with distributed reflectors as there is a need to discriminate between effective and physical cavity lengths. Hence, Phase-Sensitive Optical Low Coherence Interferometry has been implemented to characterize micro-cavities with planar or curved reflectors. Beside the retrieved physical length, we obtain valuable information about the reflector thickness and number of layers. The accuracy of the technique has been estimated. Results suggest that this technique might be suitable to retrieve dimensional characteristics of any device constructed from multiple dielectric layers, whose thickness ranges from 2 micrometers up to hundreds of micrometers.
url http://dx.doi.org/10.1063/1.4727741
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