A Standard CMOS Humidity Sensor without Post-Processing

A 2 µW power dissipation, voltage-output, humidity sensor accurate to 5% relative humidity was developed using the LFoundry 0.15 µm CMOS technology without post-processing. The sensor consists of a woven lateral array of electrodes implemented in CMOS top metal, a Intervia Photodielectric 8023-10 hu...

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Main Authors:	Oleg Nizhnik, Kazusuke Maenaka, Kohei Higuchi
Format:	Article
Language:	English
Published:	MDPI AG 2011-06-01
Series:	Sensors
Subjects:	capacitive sensors microsensors humidity measurement CMOS integrated circuits
Online Access:	http://www.mdpi.com/1424-8220/11/6/6197/

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spelling	doaj-9b9ef002856048058f683b35ec560b602020-11-25T00:25:44ZengMDPI AGSensors1424-82202011-06-011166197620210.3390/s110606197A Standard CMOS Humidity Sensor without Post-ProcessingOleg NizhnikKazusuke MaenakaKohei HiguchiA 2 µW power dissipation, voltage-output, humidity sensor accurate to 5% relative humidity was developed using the LFoundry 0.15 µm CMOS technology without post-processing. The sensor consists of a woven lateral array of electrodes implemented in CMOS top metal, a Intervia Photodielectric 8023-10 humidity-sensitive layer, and a CMOS capacitance to voltage converter.http://www.mdpi.com/1424-8220/11/6/6197/capacitive sensorsmicrosensorshumidity measurementCMOS integrated circuits
collection	DOAJ
language	English
format	Article
sources	DOAJ
author	Oleg Nizhnik Kazusuke Maenaka Kohei Higuchi
spellingShingle	Oleg Nizhnik Kazusuke Maenaka Kohei Higuchi A Standard CMOS Humidity Sensor without Post-Processing Sensors capacitive sensors microsensors humidity measurement CMOS integrated circuits
author_facet	Oleg Nizhnik Kazusuke Maenaka Kohei Higuchi
author_sort	Oleg Nizhnik
title	A Standard CMOS Humidity Sensor without Post-Processing
title_short	A Standard CMOS Humidity Sensor without Post-Processing
title_full	A Standard CMOS Humidity Sensor without Post-Processing
title_fullStr	A Standard CMOS Humidity Sensor without Post-Processing
title_full_unstemmed	A Standard CMOS Humidity Sensor without Post-Processing
title_sort	standard cmos humidity sensor without post-processing
publisher	MDPI AG
series	Sensors
issn	1424-8220
publishDate	2011-06-01
description	A 2 µW power dissipation, voltage-output, humidity sensor accurate to 5% relative humidity was developed using the LFoundry 0.15 µm CMOS technology without post-processing. The sensor consists of a woven lateral array of electrodes implemented in CMOS top metal, a Intervia Photodielectric 8023-10 humidity-sensitive layer, and a CMOS capacitance to voltage converter.
topic	capacitive sensors microsensors humidity measurement CMOS integrated circuits
url	http://www.mdpi.com/1424-8220/11/6/6197/
work_keys_str_mv	AT olegnizhnik astandardcmoshumiditysensorwithoutpostprocessing AT kazusukemaenaka astandardcmoshumiditysensorwithoutpostprocessing AT koheihiguchi astandardcmoshumiditysensorwithoutpostprocessing AT olegnizhnik standardcmoshumiditysensorwithoutpostprocessing AT kazusukemaenaka standardcmoshumiditysensorwithoutpostprocessing AT koheihiguchi standardcmoshumiditysensorwithoutpostprocessing
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A Standard CMOS Humidity Sensor without Post-Processing

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