Stationary beam full-field transmission helium ion microscopy using sub-50 keV He+: Projected images and intensity patterns

Stationary beam full-field transmission helium ion microscopy using sub-50 keV He+: Projected images and intensity patterns

A dedicated transmission helium ion microscope (THIM) for sub-50 keV helium has been constructed to investigate ion scattering processes and contrast mechanisms, aiding the development of new imaging and analysis modalities. Unlike a commercial helium ion microscope (HIM), the in-house built instrum...

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Bibliographic Details
Main Authors: Michael Mousley, Santhana Eswara, Olivier De Castro, Olivier Bouton, Nico Klingner, Christoph T. Koch, Gregor Hlawacek, Tom Wirtz
Format: Article
Language:English
Published: Beilstein-Institut 2019-08-01
Series:Beilstein Journal of Nanotechnology
Subjects:
charging
helium ion microscopy
ion diffraction
ion scattering
transmission ion microscopy
Online Access:https://doi.org/10.3762/bjnano.10.160

Internet

https://doi.org/10.3762/bjnano.10.160

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