Effects in the Optical and Structural Properties Caused by Mg or Zn Doping of GaN Films Grown via Radio-Frequency Magnetron Sputtering Using Laboratory-Prepared Targets

Effects in the Optical and Structural Properties Caused by Mg or Zn Doping of GaN Films Grown via Radio-Frequency Magnetron Sputtering Using Laboratory-Prepared Targets

GaN films doped with Mg or Zn were obtained via radio-frequency magnetron sputtering on silicon substrates at room temperature and used laboratory-prepared targets with Mg-doped or Zn-doped GaN powders. X-ray diffraction patterns showed broadening peaks, which could have been related to the appearan...

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Bibliographic Details
Main Authors: Erick Gastellóu, Godofredo García, Ana María Herrera, Crisoforo Morales, Rafael García, Gustavo Alonso Hirata, Enrique Rosendo, José Alberto Luna, Mario Robles, Jorge Alberto Rodríguez, Yani Dallane Ramírez
Format: Article
Language:English
Published: MDPI AG 2021-07-01
Series:Applied Sciences
Subjects:
target
GaN
radio-frequency magnetron sputtering
incorporation
film
Online Access:https://www.mdpi.com/2076-3417/11/15/6990

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https://www.mdpi.com/2076-3417/11/15/6990

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