Excellent ferroelectricity of 50 nm-thick doped HfO2 thin films induced by annealing with a rapid-heating-temperature process
The ferroelectric HfO2 thin film has attracted a lot of research interest due to being Pb free and its excellent compatibility with the Si-based semiconductor process. However, methods to obtain thicker HfO2 thin films with strong ferroelectricity have yet to be explored. In this work, a 50 nm-thick...
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doaj-a103b22033c04dc39d41831bb5aa5d9e2020-11-25T03:43:31ZengAIP Publishing LLCAIP Advances2158-32262020-08-01108085024085024-610.1063/5.0013511Excellent ferroelectricity of 50 nm-thick doped HfO2 thin films induced by annealing with a rapid-heating-temperature processZhiyong Quan0Meimei Wang1Xiao Zhang2Huihui Liu3Wei Zhang4Xiaohong Xu5Key Laboratory of Magnetic Molecules and Magnetic Information Materials of Ministry of Education, School of Chemistry and Materials Science, Shanxi Normal University, Linfen 041004, ChinaKey Laboratory of Magnetic Molecules and Magnetic Information Materials of Ministry of Education, School of Chemistry and Materials Science, Shanxi Normal University, Linfen 041004, ChinaResearch Institute of Materials Science, Shanxi Normal University, Linfen 041004, ChinaKey Laboratory of Magnetic Molecules and Magnetic Information Materials of Ministry of Education, School of Chemistry and Materials Science, Shanxi Normal University, Linfen 041004, ChinaKey Laboratory of Magnetic Molecules and Magnetic Information Materials of Ministry of Education, School of Chemistry and Materials Science, Shanxi Normal University, Linfen 041004, ChinaKey Laboratory of Magnetic Molecules and Magnetic Information Materials of Ministry of Education, School of Chemistry and Materials Science, Shanxi Normal University, Linfen 041004, ChinaThe ferroelectric HfO2 thin film has attracted a lot of research interest due to being Pb free and its excellent compatibility with the Si-based semiconductor process. However, methods to obtain thicker HfO2 thin films with strong ferroelectricity have yet to be explored. In this work, a 50 nm-thick La-doped HfO2 thin film was prepared using pulsed laser deposition, and significant room temperature ferroelectricity with a remnant polarization (Pr) of 27 µC/cm2 was achieved through annealing in N2 with a rapid-heating-temperature process. The ferroelectricity is mainly related to the increase in the content of the (002)-oriented orthogonal phase formed by the rapid-heating-temperature treatment. Furthermore, this special annealing process was verified in a 50 nm-thick Tm-doped HfO2 film, and the Pr of 48 µC/cm2 was observed. This value is the highest value reported so far in doped HfO2 films with a thickness of 50 nm or greater. These results provide a new approach to prepare thicker ferroelectric HfO2-based thin films.http://dx.doi.org/10.1063/5.0013511 |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
Zhiyong Quan Meimei Wang Xiao Zhang Huihui Liu Wei Zhang Xiaohong Xu |
spellingShingle |
Zhiyong Quan Meimei Wang Xiao Zhang Huihui Liu Wei Zhang Xiaohong Xu Excellent ferroelectricity of 50 nm-thick doped HfO2 thin films induced by annealing with a rapid-heating-temperature process AIP Advances |
author_facet |
Zhiyong Quan Meimei Wang Xiao Zhang Huihui Liu Wei Zhang Xiaohong Xu |
author_sort |
Zhiyong Quan |
title |
Excellent ferroelectricity of 50 nm-thick doped HfO2 thin films induced by annealing with a rapid-heating-temperature process |
title_short |
Excellent ferroelectricity of 50 nm-thick doped HfO2 thin films induced by annealing with a rapid-heating-temperature process |
title_full |
Excellent ferroelectricity of 50 nm-thick doped HfO2 thin films induced by annealing with a rapid-heating-temperature process |
title_fullStr |
Excellent ferroelectricity of 50 nm-thick doped HfO2 thin films induced by annealing with a rapid-heating-temperature process |
title_full_unstemmed |
Excellent ferroelectricity of 50 nm-thick doped HfO2 thin films induced by annealing with a rapid-heating-temperature process |
title_sort |
excellent ferroelectricity of 50 nm-thick doped hfo2 thin films induced by annealing with a rapid-heating-temperature process |
publisher |
AIP Publishing LLC |
series |
AIP Advances |
issn |
2158-3226 |
publishDate |
2020-08-01 |
description |
The ferroelectric HfO2 thin film has attracted a lot of research interest due to being Pb free and its excellent compatibility with the Si-based semiconductor process. However, methods to obtain thicker HfO2 thin films with strong ferroelectricity have yet to be explored. In this work, a 50 nm-thick La-doped HfO2 thin film was prepared using pulsed laser deposition, and significant room temperature ferroelectricity with a remnant polarization (Pr) of 27 µC/cm2 was achieved through annealing in N2 with a rapid-heating-temperature process. The ferroelectricity is mainly related to the increase in the content of the (002)-oriented orthogonal phase formed by the rapid-heating-temperature treatment. Furthermore, this special annealing process was verified in a 50 nm-thick Tm-doped HfO2 film, and the Pr of 48 µC/cm2 was observed. This value is the highest value reported so far in doped HfO2 films with a thickness of 50 nm or greater. These results provide a new approach to prepare thicker ferroelectric HfO2-based thin films. |
url |
http://dx.doi.org/10.1063/5.0013511 |
work_keys_str_mv |
AT zhiyongquan excellentferroelectricityof50nmthickdopedhfo2thinfilmsinducedbyannealingwitharapidheatingtemperatureprocess AT meimeiwang excellentferroelectricityof50nmthickdopedhfo2thinfilmsinducedbyannealingwitharapidheatingtemperatureprocess AT xiaozhang excellentferroelectricityof50nmthickdopedhfo2thinfilmsinducedbyannealingwitharapidheatingtemperatureprocess AT huihuiliu excellentferroelectricityof50nmthickdopedhfo2thinfilmsinducedbyannealingwitharapidheatingtemperatureprocess AT weizhang excellentferroelectricityof50nmthickdopedhfo2thinfilmsinducedbyannealingwitharapidheatingtemperatureprocess AT xiaohongxu excellentferroelectricityof50nmthickdopedhfo2thinfilmsinducedbyannealingwitharapidheatingtemperatureprocess |
_version_ |
1724519332063477760 |