Laser-Induced-Plasma-Assisted Ablation and Metallization on C-Plane Single Crystal Sapphire (c-Al2O3)
Laser-induced-plasma-assisted ablation (LIPAA) is a promising micro-machining method that can fabricate microstructure on hard and transparent double-polished single crystal sapphire (SCS). While ablating, a nanosecond pulse 1064 nm wavelength laser beam travels through the SCS substrate and bombard...
Main Authors: | , , , , , , , |
---|---|
Format: | Article |
Language: | English |
Published: |
MDPI AG
2017-10-01
|
Series: | Micromachines |
Subjects: | |
Online Access: | https://www.mdpi.com/2072-666X/8/10/300 |
id |
doaj-ab634617b1e143489e69ae04c2965d18 |
---|---|
record_format |
Article |
spelling |
doaj-ab634617b1e143489e69ae04c2965d182020-11-25T00:38:56ZengMDPI AGMicromachines2072-666X2017-10-0181030010.3390/mi8100300mi8100300Laser-Induced-Plasma-Assisted Ablation and Metallization on C-Plane Single Crystal Sapphire (c-Al2O3)Xizhao Lu0Feng Jiang1Tingping Lei2Rui Zhou3Chentao Zhang4Gaofeng Zheng5Qiuling Wen6Zhong Chen7College of Mechanical Engineering and Automation, Huaqiao University, Xiamen 361021, ChinaCollege of Mechanical Engineering and Automation, Huaqiao University, Xiamen 361021, ChinaCollege of Mechanical Engineering and Automation, Huaqiao University, Xiamen 361021, ChinaSchool of Aerospace Engineering, Xiamen University, Xiamen 361005, ChinaSchool of Aerospace Engineering, Xiamen University, Xiamen 361005, ChinaSchool of Aerospace Engineering, Xiamen University, Xiamen 361005, ChinaCollege of Mechanical Engineering and Automation, Huaqiao University, Xiamen 361021, ChinaDepartment of Electronic Science, Xiamen University, Xiamen 361005, ChinaLaser-induced-plasma-assisted ablation (LIPAA) is a promising micro-machining method that can fabricate microstructure on hard and transparent double-polished single crystal sapphire (SCS). While ablating, a nanosecond pulse 1064 nm wavelength laser beam travels through the SCS substrate and bombards the copper target lined up behind the substrate, which excites the ablating plasma. When laser fluence rises and is above the machining threshold of copper but below that of SCS, the kinetic energy of the copper plasma generated from the bombardment is mainly determined by the laser fluence, the repetition rate, and the substrate-to-target distance. With a lower repetition rate, SCS becomes metallized and gains conductivity. When micro-machining SCS with a pulsed laser are controlled by properly controlling laser machining parameters, such as laser fluence, repetition rate, and substrate-to-target distance, LIPAA can ablate certain line widths and depths of the microstructure as well as the resistance of SCS. On the contrary, conductivity resistance of metalized sapphire depends on laser parameters and distance in addition to lower repetition rate.https://www.mdpi.com/2072-666X/8/10/300single crystal sapphirelaser-induced-plasma-assisted ablationrepetition ratemetallizationmicro-machines |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
Xizhao Lu Feng Jiang Tingping Lei Rui Zhou Chentao Zhang Gaofeng Zheng Qiuling Wen Zhong Chen |
spellingShingle |
Xizhao Lu Feng Jiang Tingping Lei Rui Zhou Chentao Zhang Gaofeng Zheng Qiuling Wen Zhong Chen Laser-Induced-Plasma-Assisted Ablation and Metallization on C-Plane Single Crystal Sapphire (c-Al2O3) Micromachines single crystal sapphire laser-induced-plasma-assisted ablation repetition rate metallization micro-machines |
author_facet |
Xizhao Lu Feng Jiang Tingping Lei Rui Zhou Chentao Zhang Gaofeng Zheng Qiuling Wen Zhong Chen |
author_sort |
Xizhao Lu |
title |
Laser-Induced-Plasma-Assisted Ablation and Metallization on C-Plane Single Crystal Sapphire (c-Al2O3) |
title_short |
Laser-Induced-Plasma-Assisted Ablation and Metallization on C-Plane Single Crystal Sapphire (c-Al2O3) |
title_full |
Laser-Induced-Plasma-Assisted Ablation and Metallization on C-Plane Single Crystal Sapphire (c-Al2O3) |
title_fullStr |
Laser-Induced-Plasma-Assisted Ablation and Metallization on C-Plane Single Crystal Sapphire (c-Al2O3) |
title_full_unstemmed |
Laser-Induced-Plasma-Assisted Ablation and Metallization on C-Plane Single Crystal Sapphire (c-Al2O3) |
title_sort |
laser-induced-plasma-assisted ablation and metallization on c-plane single crystal sapphire (c-al2o3) |
publisher |
MDPI AG |
series |
Micromachines |
issn |
2072-666X |
publishDate |
2017-10-01 |
description |
Laser-induced-plasma-assisted ablation (LIPAA) is a promising micro-machining method that can fabricate microstructure on hard and transparent double-polished single crystal sapphire (SCS). While ablating, a nanosecond pulse 1064 nm wavelength laser beam travels through the SCS substrate and bombards the copper target lined up behind the substrate, which excites the ablating plasma. When laser fluence rises and is above the machining threshold of copper but below that of SCS, the kinetic energy of the copper plasma generated from the bombardment is mainly determined by the laser fluence, the repetition rate, and the substrate-to-target distance. With a lower repetition rate, SCS becomes metallized and gains conductivity. When micro-machining SCS with a pulsed laser are controlled by properly controlling laser machining parameters, such as laser fluence, repetition rate, and substrate-to-target distance, LIPAA can ablate certain line widths and depths of the microstructure as well as the resistance of SCS. On the contrary, conductivity resistance of metalized sapphire depends on laser parameters and distance in addition to lower repetition rate. |
topic |
single crystal sapphire laser-induced-plasma-assisted ablation repetition rate metallization micro-machines |
url |
https://www.mdpi.com/2072-666X/8/10/300 |
work_keys_str_mv |
AT xizhaolu laserinducedplasmaassistedablationandmetallizationoncplanesinglecrystalsapphirecal2o3 AT fengjiang laserinducedplasmaassistedablationandmetallizationoncplanesinglecrystalsapphirecal2o3 AT tingpinglei laserinducedplasmaassistedablationandmetallizationoncplanesinglecrystalsapphirecal2o3 AT ruizhou laserinducedplasmaassistedablationandmetallizationoncplanesinglecrystalsapphirecal2o3 AT chentaozhang laserinducedplasmaassistedablationandmetallizationoncplanesinglecrystalsapphirecal2o3 AT gaofengzheng laserinducedplasmaassistedablationandmetallizationoncplanesinglecrystalsapphirecal2o3 AT qiulingwen laserinducedplasmaassistedablationandmetallizationoncplanesinglecrystalsapphirecal2o3 AT zhongchen laserinducedplasmaassistedablationandmetallizationoncplanesinglecrystalsapphirecal2o3 |
_version_ |
1725295631436611584 |