Laser-Induced-Plasma-Assisted Ablation and Metallization on C-Plane Single Crystal Sapphire (c-Al2O3)

Laser-Induced-Plasma-Assisted Ablation and Metallization on C-Plane Single Crystal Sapphire (c-Al2O3)

Laser-induced-plasma-assisted ablation (LIPAA) is a promising micro-machining method that can fabricate microstructure on hard and transparent double-polished single crystal sapphire (SCS). While ablating, a nanosecond pulse 1064 nm wavelength laser beam travels through the SCS substrate and bombard...

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Bibliographic Details
Main Authors: Xizhao Lu, Feng Jiang, Tingping Lei, Rui Zhou, Chentao Zhang, Gaofeng Zheng, Qiuling Wen, Zhong Chen
Format: Article
Language:English
Published: MDPI AG 2017-10-01
Series:Micromachines
Subjects:
single crystal sapphire
laser-induced-plasma-assisted ablation
repetition rate
metallization
micro-machines
Online Access:https://www.mdpi.com/2072-666X/8/10/300

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