Piezoelectric Zinc Oxide Based MEMS Acoustic Sensor

Piezoelectric Zinc Oxide Based MEMS Acoustic Sensor

An acoustic sensors exhibiting good sensitivity was fabricated using MEMS technology having piezoelectric zinc oxide as a dielectric between two plates of capacitor. Thin film zinc oxide has structural, piezoelectric and optical properties for surface acoustic wave (SAW) and bulk acoustic wave (BAW...

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Bibliographic Details
Main Authors: Aarti Arora, P. J. George, Anil Arora, V. K. Dwivedi, Vinay Gupta
Format: Article
Language:English
Published: IFSA Publishing, S.L. 2008-04-01
Series:Sensors & Transducers
Subjects:
Acoustic sensor
Zinc oxide
Rf sputtering
Online Access:http://www.sensorsportal.com/HTML/DIGEST/april_08/P_260.pdf

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