Piezoelectric Zinc Oxide Based MEMS Acoustic Sensor
An acoustic sensors exhibiting good sensitivity was fabricated using MEMS technology having piezoelectric zinc oxide as a dielectric between two plates of capacitor. Thin film zinc oxide has structural, piezoelectric and optical properties for surface acoustic wave (SAW) and bulk acoustic wave (BAW...
Main Authors: | Aarti Arora, P. J. George, Anil Arora, V. K. Dwivedi, Vinay Gupta |
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Format: | Article |
Language: | English |
Published: |
IFSA Publishing, S.L.
2008-04-01
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Series: | Sensors & Transducers |
Subjects: | |
Online Access: | http://www.sensorsportal.com/HTML/DIGEST/april_08/P_260.pdf |
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