All-gas-phase synthesis of UiO-66 through modulated atomic layer deposition
Thin films of metal-organic frameworks (MOFs) are promising for catalysis, gas storage, and microelectronics. Here, the authors introduce a vapour-phase synthesis of UiO-66 thin films, beginning with modulated atomic layer deposition of porous, amorphous films, followed by acetic acid vapour-enabled...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2016-11-01
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| Series: | Nature Communications |
| Online Access: | https://doi.org/10.1038/ncomms13578 |
| Summary: | Thin films of metal-organic frameworks (MOFs) are promising for catalysis, gas storage, and microelectronics. Here, the authors introduce a vapour-phase synthesis of UiO-66 thin films, beginning with modulated atomic layer deposition of porous, amorphous films, followed by acetic acid vapour-enabled crystallization to the MOF structure. |
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| ISSN: | 2041-1723 |