Morphology and Structure Properties of Boron-doped Diamond Films Prepared by Hot Cathode Direct Current Plasma Chemical Vapor Deposition

Morphology and Structure Properties of Boron-doped Diamond Films Prepared by Hot Cathode Direct Current Plasma Chemical Vapor Deposition

<p>Boron-doped diamond (BDD) films were deposited by hot cathode direct current plasma chemical vapor deposition (HCDC-PCVD) according to various mixture ratios of CH<sub>4</sub>/H<sub>2</sub>/B(OCH<sub>3</sub>)<sub>3</sub> gas. The Raman perform...

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Bibliographic Details
Main Authors: Mengmei PAN, Hongyan PENG, Wanbang ZHAO, Hongwei JIANG
Format: Article
Language:English
Published: Kaunas University of Technology 2016-05-01
Series:Medžiagotyra
Subjects:
hot cathode direct current PCVD (HCDC-PCVD), boron-doped diamond (BDD) films, structural properties
Online Access:http://matsc.ktu.lt/index.php/MatSc/article/view/12923

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