Plasma Oxidized W-WOx Sensor for Sub-ppm H2S Detection
In this work we have fabricated W-WOx core-shell nanowire structure using plasma oxidation, a CMOS compatible process, for sensing H2S gas. For comparison, the sputtered stack structure of W-WOx with different thickness ratios of W to WOx is fabricated and characterized for H2S sensing. The sensor f...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2017-08-01
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| Series: | Proceedings |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2504-3900/1/4/402 |