Control of Bouncing in MEMS Switches Using Double Electrodes

Control of Bouncing in MEMS Switches Using Double Electrodes

This paper presents a novel way of controlling the bouncing phenomenon commonly present in the Radio Frequency Microelectromechanical Systems (RF MEMS) switches using a double-electrode configuration. The paper discusses modeling bouncing using both lumped parameter and beam models. The simulations...

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Main Authors: Farhan Abdul Rahim, Mohammad I. Younis
Format: Article
Language:English
Published: Hindawi Limited 2016-01-01
Series:Mathematical Problems in Engineering
Online Access:http://dx.doi.org/10.1155/2016/3479752
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spelling doaj-b9af9b1f57a74810b79e47675b328b882020-11-25T00:31:09ZengHindawi LimitedMathematical Problems in Engineering1024-123X1563-51472016-01-01201610.1155/2016/34797523479752Control of Bouncing in MEMS Switches Using Double ElectrodesFarhan Abdul Rahim0Mohammad I. Younis1Physical Science and Engineering Division, King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Saudi ArabiaPhysical Science and Engineering Division, King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Saudi ArabiaThis paper presents a novel way of controlling the bouncing phenomenon commonly present in the Radio Frequency Microelectromechanical Systems (RF MEMS) switches using a double-electrode configuration. The paper discusses modeling bouncing using both lumped parameter and beam models. The simulations of bouncing and its control are discussed. Comparison between the new proposed method and other available control techniques is also made. The Galerkin method is applied on the beam model accounting for the nonlinear electrostatic force, squeeze film damping, and surface contact effect. The results indicate that it is possible to reduce bouncing and hence beam degradation, by the use of double electrodes.http://dx.doi.org/10.1155/2016/3479752
collection DOAJ
language English
format Article
sources DOAJ
author Farhan Abdul Rahim
Mohammad I. Younis
spellingShingle Farhan Abdul Rahim
Mohammad I. Younis
Control of Bouncing in MEMS Switches Using Double Electrodes
Mathematical Problems in Engineering
author_facet Farhan Abdul Rahim
Mohammad I. Younis
author_sort Farhan Abdul Rahim
title Control of Bouncing in MEMS Switches Using Double Electrodes
title_short Control of Bouncing in MEMS Switches Using Double Electrodes
title_full Control of Bouncing in MEMS Switches Using Double Electrodes
title_fullStr Control of Bouncing in MEMS Switches Using Double Electrodes
title_full_unstemmed Control of Bouncing in MEMS Switches Using Double Electrodes
title_sort control of bouncing in mems switches using double electrodes
publisher Hindawi Limited
series Mathematical Problems in Engineering
issn 1024-123X
1563-5147
publishDate 2016-01-01
description This paper presents a novel way of controlling the bouncing phenomenon commonly present in the Radio Frequency Microelectromechanical Systems (RF MEMS) switches using a double-electrode configuration. The paper discusses modeling bouncing using both lumped parameter and beam models. The simulations of bouncing and its control are discussed. Comparison between the new proposed method and other available control techniques is also made. The Galerkin method is applied on the beam model accounting for the nonlinear electrostatic force, squeeze film damping, and surface contact effect. The results indicate that it is possible to reduce bouncing and hence beam degradation, by the use of double electrodes.
url http://dx.doi.org/10.1155/2016/3479752
work_keys_str_mv AT farhanabdulrahim controlofbouncinginmemsswitchesusingdoubleelectrodes
AT mohammadiyounis controlofbouncinginmemsswitchesusingdoubleelectrodes
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