Fabrication of α-FeSi2 nanowhiskers and nanoblades via electron beam physical vapor deposition

Iron disilicide nanowhiskers and nanoblades are synthesized by depositing Fe onto Si(100) substrates at about 900 °C via electron beam physical vapor deposition. The nanostructures are determined as single crystalline α-FeSi2 with tetragonal lattice. The nanostructures are stable with prolong exposu...

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Bibliographic Details
Main Authors: Wenting Huang, Vesna Srot, Julia Wagner, Gunther Richter
Format: Article
Language:English
Published: Elsevier 2019-11-01
Series:Materials & Design
Online Access:http://www.sciencedirect.com/science/article/pii/S0264127519305362
Description
Summary:Iron disilicide nanowhiskers and nanoblades are synthesized by depositing Fe onto Si(100) substrates at about 900 °C via electron beam physical vapor deposition. The nanostructures are determined as single crystalline α-FeSi2 with tetragonal lattice. The nanostructures are stable with prolong exposure under ambient condition, and no transformation towards β-FeSi2 is detected after 2 h annealing at 500 °C and 800 °C under high vacuum condition (10−6 mbar). The growth directions of the whiskers are found as either [001] or [100]. However, in the blades we observe grow only in [100] crystallographic direction. Changing cross-sectional shape of the α-FeSi2 whiskers from octagon at the root to rectangle at the upper part is observed and believed to be a result of the thermodynamic and kinetic anisotropy. SiO2 layer formed on the surface of the structures because of its lower surface energy compared to all iron oxides. By this a passivation, which prevents further oxidization, of the nanowhiskers is achieved. The α-FeSi2 whiskers form by root growth. Keywords: Electron beam evaporation, α-FeSi2, Whisker, Transmission electron microscopy, Atom probe tomography, Physical vapor deposition
ISSN:0264-1275