Flexible Simulation Platform for Multilayer Piezoelectric MEMS Microphones with Signal-to-Noise Ratio (SNR) Evaluation
A flexible simulation platform to design new piezoelectric MEMS (micro-electro-mechanical systems) microphones with signal-to-noise ratio (SNR) evaluation is presented. The platform is made of two blocks: a multiphysical FEM model, in order to study the acoustic, mechanical and electrical behavior o...
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doaj-bbb78adfd16345b49037e03532e5cef02020-11-24T21:21:07ZengMDPI AGProceedings2504-39002018-11-0121386210.3390/proceedings2130862proceedings2130862Flexible Simulation Platform for Multilayer Piezoelectric MEMS Microphones with Signal-to-Noise Ratio (SNR) EvaluationFabrizio Cerini0Silvia Adorno1STMicroelectronics, Via Tolomeo 1, 20010 Cornaredo (MI), ItalySTMicroelectronics, Via Tolomeo 1, 20010 Cornaredo (MI), ItalyA flexible simulation platform to design new piezoelectric MEMS (micro-electro-mechanical systems) microphones with signal-to-noise ratio (SNR) evaluation is presented. The platform is made of two blocks: a multiphysical FEM model, in order to study the acoustic, mechanical and electrical behavior of the MEMS structure, and an equivalent electro-mechanical-acoustic lumped-element model, which allows studying the microphone system, i.e. the MEMS-package-ASIC interaction. The platform gives precise estimation of sensitivity and SNR, key parameters of a microphone.https://www.mdpi.com/2504-3900/2/13/862simulation platform, MEMS microphones, piezoelectric microphones, multilayers piezoelectric MEMS |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
Fabrizio Cerini Silvia Adorno |
spellingShingle |
Fabrizio Cerini Silvia Adorno Flexible Simulation Platform for Multilayer Piezoelectric MEMS Microphones with Signal-to-Noise Ratio (SNR) Evaluation Proceedings simulation platform, MEMS microphones, piezoelectric microphones, multilayers piezoelectric MEMS |
author_facet |
Fabrizio Cerini Silvia Adorno |
author_sort |
Fabrizio Cerini |
title |
Flexible Simulation Platform for Multilayer Piezoelectric MEMS Microphones with Signal-to-Noise Ratio (SNR) Evaluation |
title_short |
Flexible Simulation Platform for Multilayer Piezoelectric MEMS Microphones with Signal-to-Noise Ratio (SNR) Evaluation |
title_full |
Flexible Simulation Platform for Multilayer Piezoelectric MEMS Microphones with Signal-to-Noise Ratio (SNR) Evaluation |
title_fullStr |
Flexible Simulation Platform for Multilayer Piezoelectric MEMS Microphones with Signal-to-Noise Ratio (SNR) Evaluation |
title_full_unstemmed |
Flexible Simulation Platform for Multilayer Piezoelectric MEMS Microphones with Signal-to-Noise Ratio (SNR) Evaluation |
title_sort |
flexible simulation platform for multilayer piezoelectric mems microphones with signal-to-noise ratio (snr) evaluation |
publisher |
MDPI AG |
series |
Proceedings |
issn |
2504-3900 |
publishDate |
2018-11-01 |
description |
A flexible simulation platform to design new piezoelectric MEMS (micro-electro-mechanical systems) microphones with signal-to-noise ratio (SNR) evaluation is presented. The platform is made of two blocks: a multiphysical FEM model, in order to study the acoustic, mechanical and electrical behavior of the MEMS structure, and an equivalent electro-mechanical-acoustic lumped-element model, which allows studying the microphone system, i.e. the MEMS-package-ASIC interaction. The platform gives precise estimation of sensitivity and SNR, key parameters of a microphone. |
topic |
simulation platform, MEMS microphones, piezoelectric microphones, multilayers piezoelectric MEMS |
url |
https://www.mdpi.com/2504-3900/2/13/862 |
work_keys_str_mv |
AT fabriziocerini flexiblesimulationplatformformultilayerpiezoelectricmemsmicrophoneswithsignaltonoiseratiosnrevaluation AT silviaadorno flexiblesimulationplatformformultilayerpiezoelectricmemsmicrophoneswithsignaltonoiseratiosnrevaluation |
_version_ |
1726000950127099904 |