TiN THIN FILMS: DEFECT GENERATION, RESIDUAL STRESSES AND HARDNESS
Main Authors: | Hultman, Lars, Sundgren, Jan-Eric |
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Format: | Article |
Language: | English |
Published: |
De Gruyter
2000-06-01
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Series: | Journal of the Mechanical Behavior of Materials |
Online Access: | https://doi.org/10.1515/JMBM.2000.11.1-3.59 |
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