DLC Films Deposited by the DC PACVD Method

DLC (Diamond-Like Carbon) coatings have been suggested as protective surface layers against wear. However hard DLC coatings, especially those of greater thickness, have poor adhesion to substrates. We have used several ways to increase the adhesion of DLC coatings prepared by the PACVD (Plasma Assis...

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Main Authors: D. Palamarchuk, M. Zoriy, J. Gurovič, F. Černý, S. Konvičková, I. Hüttel
Format: Article
Language:English
Published: CTU Central Library 2003-01-01
Series:Acta Polytechnica
Subjects:
DLC
Online Access:https://ojs.cvut.cz/ojs/index.php/ap/article/view/398
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spelling doaj-bfd42eb211134f8b9128c09dfc6842502020-11-24T22:26:10ZengCTU Central LibraryActa Polytechnica1210-27091805-23632003-01-01431398DLC Films Deposited by the DC PACVD MethodD. PalamarchukM. ZoriyJ. GurovičF. ČernýS. KonvičkováI. HüttelDLC (Diamond-Like Carbon) coatings have been suggested as protective surface layers against wear. However hard DLC coatings, especially those of greater thickness, have poor adhesion to substrates. We have used several ways to increase the adhesion of DLC coatings prepared by the PACVD (Plasma Assisted Chemical Vapour Deposition) method on steel substrates. One of these is the DC PACVD method for preparing DLC films.https://ojs.cvut.cz/ojs/index.php/ap/article/view/398DLCPACVDmicrohardnessadhesion
collection DOAJ
language English
format Article
sources DOAJ
author D. Palamarchuk
M. Zoriy
J. Gurovič
F. Černý
S. Konvičková
I. Hüttel
spellingShingle D. Palamarchuk
M. Zoriy
J. Gurovič
F. Černý
S. Konvičková
I. Hüttel
DLC Films Deposited by the DC PACVD Method
Acta Polytechnica
DLC
PACVD
microhardness
adhesion
author_facet D. Palamarchuk
M. Zoriy
J. Gurovič
F. Černý
S. Konvičková
I. Hüttel
author_sort D. Palamarchuk
title DLC Films Deposited by the DC PACVD Method
title_short DLC Films Deposited by the DC PACVD Method
title_full DLC Films Deposited by the DC PACVD Method
title_fullStr DLC Films Deposited by the DC PACVD Method
title_full_unstemmed DLC Films Deposited by the DC PACVD Method
title_sort dlc films deposited by the dc pacvd method
publisher CTU Central Library
series Acta Polytechnica
issn 1210-2709
1805-2363
publishDate 2003-01-01
description DLC (Diamond-Like Carbon) coatings have been suggested as protective surface layers against wear. However hard DLC coatings, especially those of greater thickness, have poor adhesion to substrates. We have used several ways to increase the adhesion of DLC coatings prepared by the PACVD (Plasma Assisted Chemical Vapour Deposition) method on steel substrates. One of these is the DC PACVD method for preparing DLC films.
topic DLC
PACVD
microhardness
adhesion
url https://ojs.cvut.cz/ojs/index.php/ap/article/view/398
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