Phase Transformation and Superstructure Formation in (Ti<sub>0.5</sub>, Mg<sub>0.5</sub>)N Thin Films through High-Temperature Annealing

Phase Transformation and Superstructure Formation in (Ti<sub>0.5</sub>, Mg<sub>0.5</sub>)N Thin Films through High-Temperature Annealing

(Ti<sub>0.5</sub>, Mg<sub>0.5</sub>)N thin films were synthesized by reactive dc magnetron sputtering from elemental targets onto c-cut sapphire substrates. Characterization by θ–2θ X-ray diffraction and pole figure measurements shows a rock-salt cubic structure with (111)-or...

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Bibliographic Details
Main Authors:	Mohammad Amin Gharavi, Arnaud le Febvrier, Jun Lu, Grzegorz Greczynski, Björn Alling, Rickard Armiento, Per Eklund
Format:	Article
Language:	English
Published:	MDPI AG 2021-01-01
Series:	Coatings
Subjects:	sputtering thermoelectrics titanium nitride magnesium nitride ternary nitride
Online Access:	https://www.mdpi.com/2079-6412/11/1/89

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