Research on the influence of the filtrating electrode on the structure and optical properties of TiO2 thin films prepared by the energy filtering magnetron sputtering technique

TiO2 thin films were deposited by the energy filtrating magnetron sputtering (EFMS) technique and the traditional direct current magnetron sputtering (DMS) technique. The influence of the filtering electrode mesh number on the structure and optical properties of TiO2 thin films was investigated. The...

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Main Authors:	Wang Zhaoyong, Jiang Weifen, Lu Yifan, Wang Xinlian, Huang Xiaoya, Yao Ning
Format:	Article
Language:	English
Published:	Sciendo 2020-03-01
Series:	Materials Science-Poland
Subjects:	energy filtering magnetron sputtering tio2 thin film optical property
Online Access:	https://doi.org/10.2478/msp-2019-0082

id	doaj-c47f571006624713a1a793fcf0484d8d
record_format	Article
spelling	doaj-c47f571006624713a1a793fcf0484d8d2021-09-06T19:22:36ZengSciendoMaterials Science-Poland2083-134X2020-03-013811710.2478/msp-2019-0082msp-2019-0082Research on the influence of the filtrating electrode on the structure and optical properties of TiO2 thin films prepared by the energy filtering magnetron sputtering techniqueWang Zhaoyong0Jiang Weifen1Lu Yifan2Wang Xinlian3Huang Xiaoya4Yao Ning5School of Mathematics and Physics, Henan Urban Construction University, Pingdingshan 467036, ChinaDepartments of Mathematics and Information Science, North China University of Water Resources and Electric Power, Zhengzhou450045, ChinaSchool of Mechatronics Engineering, Harbin Institute of Technology,Harbin150001, ChinaSchool of Mathematics and Physics, Henan Urban Construction University, Pingdingshan 467036, ChinaSchool of Mathematics and Physics, Henan Urban Construction University, Pingdingshan 467036, ChinaSchool of Physical Engineering and Laboratory of Material Physics, Zhengzhou University, Zhengzhou450052, ChinaTiO2 thin films were deposited by the energy filtrating magnetron sputtering (EFMS) technique and the traditional direct current magnetron sputtering (DMS) technique. The influence of the filtering electrode mesh number on the structure and optical properties of TiO2 thin films was investigated. The structure, surface morphology and optical properties were characterized by XRD, SEM and ellipsometric spectroscopy, respectively. Results show that the TiO2 thin films deposited by the DMS and EFMS techniques at the same deposition parameters are composed of the anatase phase exclusively. TiO2 thin films deposited at lower deposition rate by the EFMS technique have lower crystallinity, smaller particle size and smoother surface. With increasing the mesh number, the refractive index, extinction coefficient and optical band gap are larger.https://doi.org/10.2478/msp-2019-0082energy filtering magnetron sputteringtio2 thin filmoptical property
collection	DOAJ
language	English
format	Article
sources	DOAJ
author	Wang Zhaoyong Jiang Weifen Lu Yifan Wang Xinlian Huang Xiaoya Yao Ning
spellingShingle	Wang Zhaoyong Jiang Weifen Lu Yifan Wang Xinlian Huang Xiaoya Yao Ning Research on the influence of the filtrating electrode on the structure and optical properties of TiO2 thin films prepared by the energy filtering magnetron sputtering technique Materials Science-Poland energy filtering magnetron sputtering tio2 thin film optical property
author_facet	Wang Zhaoyong Jiang Weifen Lu Yifan Wang Xinlian Huang Xiaoya Yao Ning
author_sort	Wang Zhaoyong
title	Research on the influence of the filtrating electrode on the structure and optical properties of TiO2 thin films prepared by the energy filtering magnetron sputtering technique
title_short	Research on the influence of the filtrating electrode on the structure and optical properties of TiO2 thin films prepared by the energy filtering magnetron sputtering technique
title_full	Research on the influence of the filtrating electrode on the structure and optical properties of TiO2 thin films prepared by the energy filtering magnetron sputtering technique
title_fullStr	Research on the influence of the filtrating electrode on the structure and optical properties of TiO2 thin films prepared by the energy filtering magnetron sputtering technique
title_full_unstemmed	Research on the influence of the filtrating electrode on the structure and optical properties of TiO2 thin films prepared by the energy filtering magnetron sputtering technique
title_sort	research on the influence of the filtrating electrode on the structure and optical properties of tio2 thin films prepared by the energy filtering magnetron sputtering technique
publisher	Sciendo
series	Materials Science-Poland
issn	2083-134X
publishDate	2020-03-01
description	TiO2 thin films were deposited by the energy filtrating magnetron sputtering (EFMS) technique and the traditional direct current magnetron sputtering (DMS) technique. The influence of the filtering electrode mesh number on the structure and optical properties of TiO2 thin films was investigated. The structure, surface morphology and optical properties were characterized by XRD, SEM and ellipsometric spectroscopy, respectively. Results show that the TiO2 thin films deposited by the DMS and EFMS techniques at the same deposition parameters are composed of the anatase phase exclusively. TiO2 thin films deposited at lower deposition rate by the EFMS technique have lower crystallinity, smaller particle size and smoother surface. With increasing the mesh number, the refractive index, extinction coefficient and optical band gap are larger.
topic	energy filtering magnetron sputtering tio2 thin film optical property
url	https://doi.org/10.2478/msp-2019-0082
work_keys_str_mv	AT wangzhaoyong researchontheinfluenceofthefiltratingelectrodeonthestructureandopticalpropertiesoftio2thinfilmspreparedbytheenergyfilteringmagnetronsputteringtechnique AT jiangweifen researchontheinfluenceofthefiltratingelectrodeonthestructureandopticalpropertiesoftio2thinfilmspreparedbytheenergyfilteringmagnetronsputteringtechnique AT luyifan researchontheinfluenceofthefiltratingelectrodeonthestructureandopticalpropertiesoftio2thinfilmspreparedbytheenergyfilteringmagnetronsputteringtechnique AT wangxinlian researchontheinfluenceofthefiltratingelectrodeonthestructureandopticalpropertiesoftio2thinfilmspreparedbytheenergyfilteringmagnetronsputteringtechnique AT huangxiaoya researchontheinfluenceofthefiltratingelectrodeonthestructureandopticalpropertiesoftio2thinfilmspreparedbytheenergyfilteringmagnetronsputteringtechnique AT yaoning researchontheinfluenceofthefiltratingelectrodeonthestructureandopticalpropertiesoftio2thinfilmspreparedbytheenergyfilteringmagnetronsputteringtechnique
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Research on the influence of the filtrating electrode on the structure and optical properties of TiO2 thin films prepared by the energy filtering magnetron sputtering technique

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