Research on the influence of the filtrating electrode on the structure and optical properties of TiO2 thin films prepared by the energy filtering magnetron sputtering technique
TiO2 thin films were deposited by the energy filtrating magnetron sputtering (EFMS) technique and the traditional direct current magnetron sputtering (DMS) technique. The influence of the filtering electrode mesh number on the structure and optical properties of TiO2 thin films was investigated. The...
Main Authors: | Wang Zhaoyong, Jiang Weifen, Lu Yifan, Wang Xinlian, Huang Xiaoya, Yao Ning |
---|---|
Format: | Article |
Language: | English |
Published: |
Sciendo
2020-03-01
|
Series: | Materials Science-Poland |
Subjects: | |
Online Access: | https://doi.org/10.2478/msp-2019-0082 |
Similar Items
-
Photocatalytic Properties of Doped TiO2 Coatings Deposited Using Reactive Magnetron Sputtering
by: Parnia Navabpour, et al.
Published: (2017-01-01) -
Fabrication of Pt/Ti/TiO2 Photoelectrodes by RF-Magnetron Sputtering for Separate Hydrogen and Oxygen Production
by: Gian Luca Chiarello, et al.
Published: (2016-04-01) -
Biocompatibility and Surface Properties of TiO2 Thin Films Deposited by DC Magnetron Sputtering
by: Francisco López-Huerta, et al.
Published: (2014-05-01) -
IR SPECTROSCOPY OF Fe-TiO2, FILMS PREPARED BY MAGNETRON SPUTTERING
by: Logachova Vera A., et al.
Published: (2017-06-01) -
Optical parameters induced by phase transformation in RF magnetron sputtered TiO2 nanostructured thin films
by: Prabitha B. Nair, et al.
Published: (2014-06-01)