Tailoring the structural and magnetic properties of masked CoPt thin films using ion implantation
The effects of ion implantations through a mask on the structural and magnetic properties of Co80Pt20 films were investigated. The mask was patterned using the self-assembly of diblock copolymers. For implantation, high (40 keV for 14N+ and 100 keV for 40Ar+) and low (7.5 keV for 14N+ and 4.5 keV fo...
Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
AIP Publishing LLC
2018-05-01
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Series: | AIP Advances |
Online Access: | http://dx.doi.org/10.1063/1.5007767 |