Micro Vibration Measurement with Microscopic Speckle Interferometry Based on Orthogonal Phase

Micro Vibration Measurement with Microscopic Speckle Interferometry Based on Orthogonal Phase

A micro-device vibration measurement method based on microscopic speckle interferometry combined with orthogonal phase is presented. This method utilizes the approximate linear distribution characteristics of orthogonal points (points satisfying the condition that the initial phase difference equal...

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Bibliographic Details
Main Authors: Chenjia Gao, Zhan Gao, Yuhao Niu, Xu Wang, Jieming Zhao, Lin Deng
Format: Article
Language:English
Published: MDPI AG 2021-06-01
Series:Applied Sciences
Subjects:
micro vibration
real-time
full-field
microscopic speckle interferometry
orthogonal phase
Online Access:https://www.mdpi.com/2076-3417/11/11/5251
id doaj-c7ce18191a3441019ade63e76a0dfc4d
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spelling doaj-c7ce18191a3441019ade63e76a0dfc4d2021-06-30T23:25:03ZengMDPI AGApplied Sciences2076-34172021-06-01115251525110.3390/app11115251Micro Vibration Measurement with Microscopic Speckle Interferometry Based on Orthogonal PhaseChenjia Gao0Zhan Gao1Yuhao Niu2Xu Wang3Jieming Zhao4Lin Deng5Key Laboratory of Luminescence and Optical Information of Ministry of Education, Beijing Jiaotong University, Beijing 100044, ChinaKey Laboratory of Luminescence and Optical Information of Ministry of Education, Beijing Jiaotong University, Beijing 100044, ChinaKey Laboratory of Luminescence and Optical Information of Ministry of Education, Beijing Jiaotong University, Beijing 100044, ChinaKey Laboratory of Luminescence and Optical Information of Ministry of Education, Beijing Jiaotong University, Beijing 100044, ChinaKey Laboratory of Luminescence and Optical Information of Ministry of Education, Beijing Jiaotong University, Beijing 100044, ChinaKey Laboratory of Luminescence and Optical Information of Ministry of Education, Beijing Jiaotong University, Beijing 100044, ChinaA micro-device vibration measurement method based on microscopic speckle interferometry combined with orthogonal phase is presented. This method utilizes the approximate linear distribution characteristics of orthogonal points (points satisfying the condition that the initial phase difference equal to π/2) to quickly obtain the vibration information of the measured object. Compared with common optical measurement methods, this method does not require scanning imaging and can realize real-time full-field measurement. Moreover, the measurement principle and equipment is simple, so there is no need to introduce a stroboscopic light source or heterodyne device.https://www.mdpi.com/2076-3417/11/11/5251micro vibrationreal-timefull-fieldmicroscopic speckle interferometryorthogonal phase
collection DOAJ
language English
format Article
sources DOAJ
author Chenjia Gao
Zhan Gao
Yuhao Niu
Xu Wang
Jieming Zhao
Lin Deng
spellingShingle Chenjia Gao
Zhan Gao
Yuhao Niu
Xu Wang
Jieming Zhao
Lin Deng
Micro Vibration Measurement with Microscopic Speckle Interferometry Based on Orthogonal Phase
Applied Sciences
micro vibration
real-time
full-field
microscopic speckle interferometry
orthogonal phase
author_facet Chenjia Gao
Zhan Gao
Yuhao Niu
Xu Wang
Jieming Zhao
Lin Deng
author_sort Chenjia Gao
title Micro Vibration Measurement with Microscopic Speckle Interferometry Based on Orthogonal Phase
title_short Micro Vibration Measurement with Microscopic Speckle Interferometry Based on Orthogonal Phase
title_full Micro Vibration Measurement with Microscopic Speckle Interferometry Based on Orthogonal Phase
title_fullStr Micro Vibration Measurement with Microscopic Speckle Interferometry Based on Orthogonal Phase
title_full_unstemmed Micro Vibration Measurement with Microscopic Speckle Interferometry Based on Orthogonal Phase
title_sort micro vibration measurement with microscopic speckle interferometry based on orthogonal phase
publisher MDPI AG
series Applied Sciences
issn 2076-3417
publishDate 2021-06-01
description A micro-device vibration measurement method based on microscopic speckle interferometry combined with orthogonal phase is presented. This method utilizes the approximate linear distribution characteristics of orthogonal points (points satisfying the condition that the initial phase difference equal to π/2) to quickly obtain the vibration information of the measured object. Compared with common optical measurement methods, this method does not require scanning imaging and can realize real-time full-field measurement. Moreover, the measurement principle and equipment is simple, so there is no need to introduce a stroboscopic light source or heterodyne device.
topic micro vibration
real-time
full-field
microscopic speckle interferometry
orthogonal phase
url https://www.mdpi.com/2076-3417/11/11/5251
work_keys_str_mv AT chenjiagao microvibrationmeasurementwithmicroscopicspeckleinterferometrybasedonorthogonalphase
AT zhangao microvibrationmeasurementwithmicroscopicspeckleinterferometrybasedonorthogonalphase
AT yuhaoniu microvibrationmeasurementwithmicroscopicspeckleinterferometrybasedonorthogonalphase
AT xuwang microvibrationmeasurementwithmicroscopicspeckleinterferometrybasedonorthogonalphase
AT jiemingzhao microvibrationmeasurementwithmicroscopicspeckleinterferometrybasedonorthogonalphase
AT lindeng microvibrationmeasurementwithmicroscopicspeckleinterferometrybasedonorthogonalphase
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