Invited Article: Precision nanoimplantation of nitrogen vacancy centers into diamond photonic crystal cavities and waveguides
We demonstrate a self-aligned lithographic technique for precision generation of nitrogen vacancy (NV) centers within photonic nanostructures on bulk diamond substrates. The process relies on a lithographic mask with nanoscale implantation apertures for NV creation, together with larger features for...
Main Authors: | M. Schukraft, J. Zheng, T. Schröder, S. L. Mouradian, M. Walsh, M. E. Trusheim, H. Bakhru, D. R. Englund |
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Format: | Article |
Language: | English |
Published: |
AIP Publishing LLC
2016-05-01
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Series: | APL Photonics |
Online Access: | http://dx.doi.org/10.1063/1.4948746 |
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