APA (7th ed.) Citation

Tabata, T., Curvers, B., Huet, K., Chew, S. A., Everaert, J., & Horiguchi, N. (2020). 3D Simulation for Melt Laser Anneal Integration in FinFET’s Contact. IEEE.

Chicago Style (17th ed.) Citation

Tabata, Toshiyuki, Benoit Curvers, Karim Huet, Soon Aik Chew, Jean-Luc Everaert, and Naoto Horiguchi. 3D Simulation for Melt Laser Anneal Integration in FinFET’s Contact. IEEE, 2020.

MLA (8th ed.) Citation

Tabata, Toshiyuki, et al. 3D Simulation for Melt Laser Anneal Integration in FinFET’s Contact. IEEE, 2020.