Titanium Dioxide Nanoparticle Humidity Microsensors Integrated with Circuitry on-a-Chip
A humidity microsensor integrated with a readout circuit on-a-chip fabricated using the commercial 0.18 μm CMOS (complementary metal oxide semiconductor) process was presented. The integrated sensor chip consists of a humidity sensor and a readout circuit. The humidity sensor is composed of a sensit...
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doaj-ce9cec25ea2a46cfafa04a335dff3a322020-11-24T23:43:17ZengMDPI AGSensors1424-82202014-03-011434177418810.3390/s140304177s140304177Titanium Dioxide Nanoparticle Humidity Microsensors Integrated with Circuitry on-a-ChipYu-Chih Hu0Ching-Liang Dai1Cheng-Chih Hsu2Department of Mechanical Engineering, National Chung Hsing University, Taichung 402, TaiwanDepartment of Mechanical Engineering, National Chung Hsing University, Taichung 402, TaiwanDepartment of Electro-Optical Engineering, Yuan Ze University, Taoyuan 320, TaiwanA humidity microsensor integrated with a readout circuit on-a-chip fabricated using the commercial 0.18 μm CMOS (complementary metal oxide semiconductor) process was presented. The integrated sensor chip consists of a humidity sensor and a readout circuit. The humidity sensor is composed of a sensitive film and interdigitated electrodes. The sensitive film is titanium dioxide prepared by the sol-gel method. The titanium dioxide is coated on the interdigitated electrodes. The humidity sensor requires a post-process to remove the sacrificial layer and to coat the titanium dioxide. The resistance of the sensor changes as the sensitive film absorbs or desorbs vapor. The readout circuit is employed to convert the resistance variation of the sensor into the output voltage. The experimental results show that the integrated humidity sensor has a sensitivity of 4.5 mV/RH% (relative humidity) at room temperature.http://www.mdpi.com/1424-8220/14/3/4177integrtaed humidity microsensortitanium dioxidereadout circuit |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
Yu-Chih Hu Ching-Liang Dai Cheng-Chih Hsu |
spellingShingle |
Yu-Chih Hu Ching-Liang Dai Cheng-Chih Hsu Titanium Dioxide Nanoparticle Humidity Microsensors Integrated with Circuitry on-a-Chip Sensors integrtaed humidity microsensor titanium dioxide readout circuit |
author_facet |
Yu-Chih Hu Ching-Liang Dai Cheng-Chih Hsu |
author_sort |
Yu-Chih Hu |
title |
Titanium Dioxide Nanoparticle Humidity Microsensors Integrated with Circuitry on-a-Chip |
title_short |
Titanium Dioxide Nanoparticle Humidity Microsensors Integrated with Circuitry on-a-Chip |
title_full |
Titanium Dioxide Nanoparticle Humidity Microsensors Integrated with Circuitry on-a-Chip |
title_fullStr |
Titanium Dioxide Nanoparticle Humidity Microsensors Integrated with Circuitry on-a-Chip |
title_full_unstemmed |
Titanium Dioxide Nanoparticle Humidity Microsensors Integrated with Circuitry on-a-Chip |
title_sort |
titanium dioxide nanoparticle humidity microsensors integrated with circuitry on-a-chip |
publisher |
MDPI AG |
series |
Sensors |
issn |
1424-8220 |
publishDate |
2014-03-01 |
description |
A humidity microsensor integrated with a readout circuit on-a-chip fabricated using the commercial 0.18 μm CMOS (complementary metal oxide semiconductor) process was presented. The integrated sensor chip consists of a humidity sensor and a readout circuit. The humidity sensor is composed of a sensitive film and interdigitated electrodes. The sensitive film is titanium dioxide prepared by the sol-gel method. The titanium dioxide is coated on the interdigitated electrodes. The humidity sensor requires a post-process to remove the sacrificial layer and to coat the titanium dioxide. The resistance of the sensor changes as the sensitive film absorbs or desorbs vapor. The readout circuit is employed to convert the resistance variation of the sensor into the output voltage. The experimental results show that the integrated humidity sensor has a sensitivity of 4.5 mV/RH% (relative humidity) at room temperature. |
topic |
integrtaed humidity microsensor titanium dioxide readout circuit |
url |
http://www.mdpi.com/1424-8220/14/3/4177 |
work_keys_str_mv |
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1725502183308263424 |