Modeling of Micromachined Thermopiles Powered from the Human Body for Energy Harvesting in Wearable Devices
The design of thermoelectric MEMS converters (power generators) suited for self-powered wearable devices is proposed and analyzed. Micromachined thermopiles are designed on top of a silicon rim and their performances are modeled for two thermoelectric materials, BiTe and polycrystalline SiGe. The a...
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IFSA Publishing, S.L.
2009-04-01
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doaj-d0338f67949543be9e8437946d6098412020-11-25T00:32:46ZengIFSA Publishing, S.L.Sensors & Transducers2306-85151726-54792009-04-0110342943Modeling of Micromachined Thermopiles Powered from the Human Body for Energy Harvesting in Wearable DevicesVladimir Leonov0Ziyang Wang1Paolo Fiorini2Chris Van Hoof3Interuniversity Microelectronics Center (IMEC), Kapeldreef 75, 3001 Leuven, BelgiumInteruniversity Microelectronics Center (IMEC), Kapeldreef 75, 3001 Leuven, BelgiumInteruniversity Microelectronics Center (IMEC), Kapeldreef 75, 3001 Leuven, BelgiumInteruniversity Microelectronics Center (IMEC), Kapeldreef 75, 3001 Leuven, Belgium The design of thermoelectric MEMS converters (power generators) suited for self-powered wearable devices is proposed and analyzed. Micromachined thermopiles are designed on top of a silicon rim and their performances are modeled for two thermoelectric materials, BiTe and polycrystalline SiGe. The advantage of the proposed design in respect to existing ones is a large output voltage combined with a relatively large generated power. The design is developed for a watch size generator and takes into account limitations of contact lithography in terms of aspect ratio and minimum feature size. Within these limitations, the output voltage is close to 1V while the output power is in excess of 1 mW for poly-SiGe based generators and close to 10 mW for BiTe based ones. http://www.sensorsportal.com/HTML/DIGEST/april_09/P_410.pdfThermoelectric generatorEnergy harvestingMEMSThermopile |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
Vladimir Leonov Ziyang Wang Paolo Fiorini Chris Van Hoof |
spellingShingle |
Vladimir Leonov Ziyang Wang Paolo Fiorini Chris Van Hoof Modeling of Micromachined Thermopiles Powered from the Human Body for Energy Harvesting in Wearable Devices Sensors & Transducers Thermoelectric generator Energy harvesting MEMS Thermopile |
author_facet |
Vladimir Leonov Ziyang Wang Paolo Fiorini Chris Van Hoof |
author_sort |
Vladimir Leonov |
title |
Modeling of Micromachined Thermopiles Powered from the Human Body for Energy Harvesting in Wearable Devices |
title_short |
Modeling of Micromachined Thermopiles Powered from the Human Body for Energy Harvesting in Wearable Devices |
title_full |
Modeling of Micromachined Thermopiles Powered from the Human Body for Energy Harvesting in Wearable Devices |
title_fullStr |
Modeling of Micromachined Thermopiles Powered from the Human Body for Energy Harvesting in Wearable Devices |
title_full_unstemmed |
Modeling of Micromachined Thermopiles Powered from the Human Body for Energy Harvesting in Wearable Devices |
title_sort |
modeling of micromachined thermopiles powered from the human body for energy harvesting in wearable devices |
publisher |
IFSA Publishing, S.L. |
series |
Sensors & Transducers |
issn |
2306-8515 1726-5479 |
publishDate |
2009-04-01 |
description |
The design of thermoelectric MEMS converters (power generators) suited for self-powered wearable devices is proposed and analyzed. Micromachined thermopiles are designed on top of a silicon rim and their performances are modeled for two thermoelectric materials, BiTe and polycrystalline SiGe. The advantage of the proposed design in respect to existing ones is a large output voltage combined with a relatively large generated power. The design is developed for a watch size generator and takes into account limitations of contact lithography in terms of aspect ratio and minimum feature size. Within these limitations, the output voltage is close to 1V while the output power is in excess of 1 mW for poly-SiGe based generators and close to 10 mW for BiTe based ones.
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topic |
Thermoelectric generator Energy harvesting MEMS Thermopile |
url |
http://www.sensorsportal.com/HTML/DIGEST/april_09/P_410.pdf |
work_keys_str_mv |
AT vladimirleonov modelingofmicromachinedthermopilespoweredfromthehumanbodyforenergyharvestinginwearabledevices AT ziyangwang modelingofmicromachinedthermopilespoweredfromthehumanbodyforenergyharvestinginwearabledevices AT paolofiorini modelingofmicromachinedthermopilespoweredfromthehumanbodyforenergyharvestinginwearabledevices AT chrisvanhoof modelingofmicromachinedthermopilespoweredfromthehumanbodyforenergyharvestinginwearabledevices |
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