Low-loss slot waveguides with silicon (111) surfaces realized using anisotropic wet etching
We demonstrate low-loss slot waveguides on silicon-on-insulator (SOI) platform. Waveguides oriented along the (11-2) direction on the Si (110) plane were first fabricated by a standard e-beam lithography and dry etching process. A TMAH based anisotropic wet etching technique was then used to remove...
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Frontiers Media S.A.
2016-11-01
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Online Access: | http://journal.frontiersin.org/Journal/10.3389/fmats.2016.00051/full |
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doaj-d4e2a4d93b1443c897fc4d533a97a0c32020-11-24T21:30:50ZengFrontiers Media S.A.Frontiers in Materials2296-80162016-11-01310.3389/fmats.2016.00051229783Low-loss slot waveguides with silicon (111) surfaces realized using anisotropic wet etchingKapil Debnath0Ali Z Khokhar1Stuart A Boden2Hideo Arimoto3Swe Zin Oo4Harold M H Chong5Graham Trevor Reed6Shinichi Saito7University of SouthamptonUniversity of SouthamptonUniversity of SouthamptonUniversity of SouthamptonUniversity of SouthamptonUniversity of SouthamptonUniversity of SouthamptonUniversity of SouthamptonWe demonstrate low-loss slot waveguides on silicon-on-insulator (SOI) platform. Waveguides oriented along the (11-2) direction on the Si (110) plane were first fabricated by a standard e-beam lithography and dry etching process. A TMAH based anisotropic wet etching technique was then used to remove any residual side wall roughness. Using this fabrication technique propagation loss as low as 3.7dB/cm was realized in silicon slot waveguide for wavelengths near 1550nm. We also realized low propagation loss of 1dB/cm for silicon strip waveguides.http://journal.frontiersin.org/Journal/10.3389/fmats.2016.00051/fullsilicon photonicsintegrated photonicsWaveguideSlot waveguideAnisotropic wet etching |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
Kapil Debnath Ali Z Khokhar Stuart A Boden Hideo Arimoto Swe Zin Oo Harold M H Chong Graham Trevor Reed Shinichi Saito |
spellingShingle |
Kapil Debnath Ali Z Khokhar Stuart A Boden Hideo Arimoto Swe Zin Oo Harold M H Chong Graham Trevor Reed Shinichi Saito Low-loss slot waveguides with silicon (111) surfaces realized using anisotropic wet etching Frontiers in Materials silicon photonics integrated photonics Waveguide Slot waveguide Anisotropic wet etching |
author_facet |
Kapil Debnath Ali Z Khokhar Stuart A Boden Hideo Arimoto Swe Zin Oo Harold M H Chong Graham Trevor Reed Shinichi Saito |
author_sort |
Kapil Debnath |
title |
Low-loss slot waveguides with silicon (111) surfaces realized using anisotropic wet etching |
title_short |
Low-loss slot waveguides with silicon (111) surfaces realized using anisotropic wet etching |
title_full |
Low-loss slot waveguides with silicon (111) surfaces realized using anisotropic wet etching |
title_fullStr |
Low-loss slot waveguides with silicon (111) surfaces realized using anisotropic wet etching |
title_full_unstemmed |
Low-loss slot waveguides with silicon (111) surfaces realized using anisotropic wet etching |
title_sort |
low-loss slot waveguides with silicon (111) surfaces realized using anisotropic wet etching |
publisher |
Frontiers Media S.A. |
series |
Frontiers in Materials |
issn |
2296-8016 |
publishDate |
2016-11-01 |
description |
We demonstrate low-loss slot waveguides on silicon-on-insulator (SOI) platform. Waveguides oriented along the (11-2) direction on the Si (110) plane were first fabricated by a standard e-beam lithography and dry etching process. A TMAH based anisotropic wet etching technique was then used to remove any residual side wall roughness. Using this fabrication technique propagation loss as low as 3.7dB/cm was realized in silicon slot waveguide for wavelengths near 1550nm. We also realized low propagation loss of 1dB/cm for silicon strip waveguides. |
topic |
silicon photonics integrated photonics Waveguide Slot waveguide Anisotropic wet etching |
url |
http://journal.frontiersin.org/Journal/10.3389/fmats.2016.00051/full |
work_keys_str_mv |
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1725961447162249216 |