Low-loss slot waveguides with silicon (111) surfaces realized using anisotropic wet etching

Low-loss slot waveguides with silicon (111) surfaces realized using anisotropic wet etching

We demonstrate low-loss slot waveguides on silicon-on-insulator (SOI) platform. Waveguides oriented along the (11-2) direction on the Si (110) plane were first fabricated by a standard e-beam lithography and dry etching process. A TMAH based anisotropic wet etching technique was then used to remove...

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Main Authors: Kapil Debnath, Ali Z Khokhar, Stuart A Boden, Hideo Arimoto, Swe Zin Oo, Harold M H Chong, Graham Trevor Reed, Shinichi Saito
Format: Article
Language:English
Published: Frontiers Media S.A. 2016-11-01
Series:Frontiers in Materials
Subjects:
silicon photonics
integrated photonics
Waveguide
Slot waveguide
Anisotropic wet etching
Online Access:http://journal.frontiersin.org/Journal/10.3389/fmats.2016.00051/full
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spelling doaj-d4e2a4d93b1443c897fc4d533a97a0c32020-11-24T21:30:50ZengFrontiers Media S.A.Frontiers in Materials2296-80162016-11-01310.3389/fmats.2016.00051229783Low-loss slot waveguides with silicon (111) surfaces realized using anisotropic wet etchingKapil Debnath0Ali Z Khokhar1Stuart A Boden2Hideo Arimoto3Swe Zin Oo4Harold M H Chong5Graham Trevor Reed6Shinichi Saito7University of SouthamptonUniversity of SouthamptonUniversity of SouthamptonUniversity of SouthamptonUniversity of SouthamptonUniversity of SouthamptonUniversity of SouthamptonUniversity of SouthamptonWe demonstrate low-loss slot waveguides on silicon-on-insulator (SOI) platform. Waveguides oriented along the (11-2) direction on the Si (110) plane were first fabricated by a standard e-beam lithography and dry etching process. A TMAH based anisotropic wet etching technique was then used to remove any residual side wall roughness. Using this fabrication technique propagation loss as low as 3.7dB/cm was realized in silicon slot waveguide for wavelengths near 1550nm. We also realized low propagation loss of 1dB/cm for silicon strip waveguides.http://journal.frontiersin.org/Journal/10.3389/fmats.2016.00051/fullsilicon photonicsintegrated photonicsWaveguideSlot waveguideAnisotropic wet etching
collection DOAJ
language English
format Article
sources DOAJ
author Kapil Debnath
Ali Z Khokhar
Stuart A Boden
Hideo Arimoto
Swe Zin Oo
Harold M H Chong
Graham Trevor Reed
Shinichi Saito
spellingShingle Kapil Debnath
Ali Z Khokhar
Stuart A Boden
Hideo Arimoto
Swe Zin Oo
Harold M H Chong
Graham Trevor Reed
Shinichi Saito
Low-loss slot waveguides with silicon (111) surfaces realized using anisotropic wet etching
Frontiers in Materials
silicon photonics
integrated photonics
Waveguide
Slot waveguide
Anisotropic wet etching
author_facet Kapil Debnath
Ali Z Khokhar
Stuart A Boden
Hideo Arimoto
Swe Zin Oo
Harold M H Chong
Graham Trevor Reed
Shinichi Saito
author_sort Kapil Debnath
title Low-loss slot waveguides with silicon (111) surfaces realized using anisotropic wet etching
title_short Low-loss slot waveguides with silicon (111) surfaces realized using anisotropic wet etching
title_full Low-loss slot waveguides with silicon (111) surfaces realized using anisotropic wet etching
title_fullStr Low-loss slot waveguides with silicon (111) surfaces realized using anisotropic wet etching
title_full_unstemmed Low-loss slot waveguides with silicon (111) surfaces realized using anisotropic wet etching
title_sort low-loss slot waveguides with silicon (111) surfaces realized using anisotropic wet etching
publisher Frontiers Media S.A.
series Frontiers in Materials
issn 2296-8016
publishDate 2016-11-01
description We demonstrate low-loss slot waveguides on silicon-on-insulator (SOI) platform. Waveguides oriented along the (11-2) direction on the Si (110) plane were first fabricated by a standard e-beam lithography and dry etching process. A TMAH based anisotropic wet etching technique was then used to remove any residual side wall roughness. Using this fabrication technique propagation loss as low as 3.7dB/cm was realized in silicon slot waveguide for wavelengths near 1550nm. We also realized low propagation loss of 1dB/cm for silicon strip waveguides.
topic silicon photonics
integrated photonics
Waveguide
Slot waveguide
Anisotropic wet etching
url http://journal.frontiersin.org/Journal/10.3389/fmats.2016.00051/full
work_keys_str_mv AT kapildebnath lowlossslotwaveguideswithsilicon111surfacesrealizedusinganisotropicwetetching
AT alizkhokhar lowlossslotwaveguideswithsilicon111surfacesrealizedusinganisotropicwetetching
AT stuartaboden lowlossslotwaveguideswithsilicon111surfacesrealizedusinganisotropicwetetching
AT hideoarimoto lowlossslotwaveguideswithsilicon111surfacesrealizedusinganisotropicwetetching
AT swezinoo lowlossslotwaveguideswithsilicon111surfacesrealizedusinganisotropicwetetching
AT haroldmhchong lowlossslotwaveguideswithsilicon111surfacesrealizedusinganisotropicwetetching
AT grahamtrevorreed lowlossslotwaveguideswithsilicon111surfacesrealizedusinganisotropicwetetching
AT shinichisaito lowlossslotwaveguideswithsilicon111surfacesrealizedusinganisotropicwetetching
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