Laser direct writing and characterizations of flexible piezoresistive sensors with microstructures

• Main Authors: Chenying Zhang, Wei Zhou, Da Geng, Cheng Bai, Weida Li, Songyue Chen, Tao Luo, Lifeng Qin, Yu Xie
• Format: Article
• Language: English
• Published: Institue of Optics and Electronics, Chinese Academy of Sciences 2021-04-01
• Series: Opto-Electronic Advances
• Subjects: flexible pressure sensor; piezoresistive sensor; microstructure; laser processing
• Online Access: http://www.oejournal.org/article/doi/10.29026/oea.2021.200061

Functional materials with high viscosity and solid materials have received more and more attentions in flexible pressure sensors, which are inadequate in the most used molding method. Herein, laser direct writing (LDW) method is proposed to fabricate flexible piezoresistive sensors with microstructures on PDMS/ MWCNTs composites with an 8% MWCNTs mass fraction. By controlling laser energy, microstructures with different geometries can be obtained, which significantly impacts the performances of the sensors. Subsequently, curved microcones with excellent performance are fabricated under parameters of f = 40 kHz and v = 150 mm·s-1. The sensor exhibits continuous multi-linear sensitivity, ultrahigh original sensitivity of 21.80 % kPa-1, wide detection range of over 20 kPa, response/recovery time of ~100 ms and good cycle stability for more than 1000 times. Besides, obvious resistance variation can be observed when tiny pressure (a peanut of 30 Pa) is applied. Finally, the flexible piezoresistive sensor can be applied for LED brightness controlling, pulse detection and voice recognition.