Characterization of Al-Doped ZnO Transparent Conducting Thin Film Prepared by Off-Axis Magnetron Sputtering

The off-axis sputtering technique was used to deposit Al-doped ZnO (AZO) films on glass substrates at room temperature. For the illustration of the sample position in the sputtering chamber, the value of R/r is introduced. Here, r is the radius of AZO target and R is the distance between the sample...

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Bibliographic Details
Main Authors: Sin-Liang Ou, Feng-Min Lai, Lun-Wei Yuan, Da-Long Cheng, Kuo-Sheng Kao
Format: Article
Language:English
Published: Hindawi Limited 2016-01-01
Series:Journal of Nanomaterials
Online Access:http://dx.doi.org/10.1155/2016/6250640

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