INTRINSIC STRESSES IN COATINGS DEPOSITED AT PLASMA IMMERSION ION IMPLANTATION
The intrinsic stresses in the coatings deposited at plasma immersion ion implantation (PIII) in pulsed bias potential mode including case of differently charged ions are theoretically investigated. An expression for dependence of internal stress on ion species and its energy, as well as duration, an...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
V.N. Karazin Kharkiv National University Publishing
2015-03-01
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| Series: | East European Journal of Physics |
| Online Access: | https://periodicals.karazin.ua/eejp/article/view/1504 |