Spin Rate Effects in a Micromachined Electrostatically Suspended Gyroscope
Spin rate of a high-speed spinning-rotor gyroscope will make a significant impact on angular rate sensor performances such as the scale factor, resolution, measurement range, and bias stability. This paper presents the spin rate effects on performance indicators of a microelectromechanical systems (...
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doaj-e57d0c023730408b89c538f23d6452a12020-11-24T22:38:40ZengMDPI AGSensors1424-82202018-11-011811390110.3390/s18113901s18113901Spin Rate Effects in a Micromachined Electrostatically Suspended GyroscopeBoqian Sun0Shunyue Wang1Yidong Tan2Yunfeng Liu3Fengtian Han4Department of Precision Instrument, Tsinghua University, Beijing 100084, ChinaDepartment of Precision Instrument, Tsinghua University, Beijing 100084, ChinaDepartment of Precision Instrument, Tsinghua University, Beijing 100084, ChinaDepartment of Precision Instrument, Tsinghua University, Beijing 100084, ChinaDepartment of Precision Instrument, Tsinghua University, Beijing 100084, ChinaSpin rate of a high-speed spinning-rotor gyroscope will make a significant impact on angular rate sensor performances such as the scale factor, resolution, measurement range, and bias stability. This paper presents the spin rate effects on performance indicators of a microelectromechanical systems (MEMS) gyroscope where a free-spinning rotor is electrostatically suspended in an evacuated vacuum cavity and functions as a dual-axis angular rate sensor. Theoretical models of the scale factor and measurement range of such a spinning-rotor gyroscope are derived. The experimental results indicate that the measured scale factors at different settings of the spin rate match well with the theoretical predication. In order to separate the disturbance component of the rotation control loop on the gyroscope output, a testing strategy is proposed by operating the gyroscope at different spin rates. Experimental results on a prototype gyroscope show that the squared drive voltage generated by the rotation control loop is approximately proportional to the noise of the gyroscope output. It was further investigated that an improved performance of such spinning-rotor gyroscopes can be achieved by operating the gyroscope rotor at an optimal spin rate.https://www.mdpi.com/1424-8220/18/11/3901MEMSmicromachined spinning-rotor gyroscopeelectrostatic suspensionspin ratescale factornoiseresolutionbias instability |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
Boqian Sun Shunyue Wang Yidong Tan Yunfeng Liu Fengtian Han |
spellingShingle |
Boqian Sun Shunyue Wang Yidong Tan Yunfeng Liu Fengtian Han Spin Rate Effects in a Micromachined Electrostatically Suspended Gyroscope Sensors MEMS micromachined spinning-rotor gyroscope electrostatic suspension spin rate scale factor noise resolution bias instability |
author_facet |
Boqian Sun Shunyue Wang Yidong Tan Yunfeng Liu Fengtian Han |
author_sort |
Boqian Sun |
title |
Spin Rate Effects in a Micromachined Electrostatically Suspended Gyroscope |
title_short |
Spin Rate Effects in a Micromachined Electrostatically Suspended Gyroscope |
title_full |
Spin Rate Effects in a Micromachined Electrostatically Suspended Gyroscope |
title_fullStr |
Spin Rate Effects in a Micromachined Electrostatically Suspended Gyroscope |
title_full_unstemmed |
Spin Rate Effects in a Micromachined Electrostatically Suspended Gyroscope |
title_sort |
spin rate effects in a micromachined electrostatically suspended gyroscope |
publisher |
MDPI AG |
series |
Sensors |
issn |
1424-8220 |
publishDate |
2018-11-01 |
description |
Spin rate of a high-speed spinning-rotor gyroscope will make a significant impact on angular rate sensor performances such as the scale factor, resolution, measurement range, and bias stability. This paper presents the spin rate effects on performance indicators of a microelectromechanical systems (MEMS) gyroscope where a free-spinning rotor is electrostatically suspended in an evacuated vacuum cavity and functions as a dual-axis angular rate sensor. Theoretical models of the scale factor and measurement range of such a spinning-rotor gyroscope are derived. The experimental results indicate that the measured scale factors at different settings of the spin rate match well with the theoretical predication. In order to separate the disturbance component of the rotation control loop on the gyroscope output, a testing strategy is proposed by operating the gyroscope at different spin rates. Experimental results on a prototype gyroscope show that the squared drive voltage generated by the rotation control loop is approximately proportional to the noise of the gyroscope output. It was further investigated that an improved performance of such spinning-rotor gyroscopes can be achieved by operating the gyroscope rotor at an optimal spin rate. |
topic |
MEMS micromachined spinning-rotor gyroscope electrostatic suspension spin rate scale factor noise resolution bias instability |
url |
https://www.mdpi.com/1424-8220/18/11/3901 |
work_keys_str_mv |
AT boqiansun spinrateeffectsinamicromachinedelectrostaticallysuspendedgyroscope AT shunyuewang spinrateeffectsinamicromachinedelectrostaticallysuspendedgyroscope AT yidongtan spinrateeffectsinamicromachinedelectrostaticallysuspendedgyroscope AT yunfengliu spinrateeffectsinamicromachinedelectrostaticallysuspendedgyroscope AT fengtianhan spinrateeffectsinamicromachinedelectrostaticallysuspendedgyroscope |
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1725712568703516672 |