Spin Rate Effects in a Micromachined Electrostatically Suspended Gyroscope

Spin Rate Effects in a Micromachined Electrostatically Suspended Gyroscope

Spin rate of a high-speed spinning-rotor gyroscope will make a significant impact on angular rate sensor performances such as the scale factor, resolution, measurement range, and bias stability. This paper presents the spin rate effects on performance indicators of a microelectromechanical systems (...

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Bibliographic Details
Main Authors: Boqian Sun, Shunyue Wang, Yidong Tan, Yunfeng Liu, Fengtian Han
Format: Article
Language:English
Published: MDPI AG 2018-11-01
Series:Sensors
Subjects:
MEMS
micromachined spinning-rotor gyroscope
electrostatic suspension
spin rate
scale factor
noise
resolution
bias instability
Online Access:https://www.mdpi.com/1424-8220/18/11/3901

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