Enhancement of silicon using micro-patterned surfaces of thin films
Micro-textured biomaterials might enhance cytocompatibility of silicon-based micro-electro-mechanical system (bio-MEMS) dummies. Photolithography-physical vapour deposition was used to produce diamond-like carbon (DLC) or Ti squares and circles on silicon, and also their inverse replicas; then DLC a...
Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
AO Research Institute Davos
2010-04-01
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Series: | European Cells & Materials |
Subjects: | |
Online Access: | http://www.ecmjournal.org/papers/vol019/pdf/v019a15.pdf |
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