A Virtual Metrology Model Based on Recursive Canonical Variate Analysis with Applications to Sputtering Process

A Virtual Metrology Model Based on Recursive Canonical Variate Analysis with Applications to Sputtering Process

Abstract preview not available - see full-text PDF article.

Bibliographic Details
Main Authors: T.H. Pan, D.S.H. Wong, S.S. Jang
Format: Article
Language:English
Published: AIDIC Servizi S.r.l. 2011-04-01
Series:Chemical Engineering Transactions
Online Access:https://www.cetjournal.it/index.php/cet/article/view/7735
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spelling doaj-e766e4a7f5a640b589a817565c321e932021-02-22T21:14:59ZengAIDIC Servizi S.r.l.Chemical Engineering Transactions2283-92162011-04-012410.3303/CET1124062A Virtual Metrology Model Based on Recursive Canonical Variate Analysis with Applications to Sputtering ProcessT.H. PanD.S.H. WongS.S. JangAbstract preview not available - see full-text PDF article.https://www.cetjournal.it/index.php/cet/article/view/7735
collection DOAJ
language English
format Article
sources DOAJ
author T.H. Pan
D.S.H. Wong
S.S. Jang
spellingShingle T.H. Pan
D.S.H. Wong
S.S. Jang
A Virtual Metrology Model Based on Recursive Canonical Variate Analysis with Applications to Sputtering Process
Chemical Engineering Transactions
author_facet T.H. Pan
D.S.H. Wong
S.S. Jang
author_sort T.H. Pan
title A Virtual Metrology Model Based on Recursive Canonical Variate Analysis with Applications to Sputtering Process
title_short A Virtual Metrology Model Based on Recursive Canonical Variate Analysis with Applications to Sputtering Process
title_full A Virtual Metrology Model Based on Recursive Canonical Variate Analysis with Applications to Sputtering Process
title_fullStr A Virtual Metrology Model Based on Recursive Canonical Variate Analysis with Applications to Sputtering Process
title_full_unstemmed A Virtual Metrology Model Based on Recursive Canonical Variate Analysis with Applications to Sputtering Process
title_sort virtual metrology model based on recursive canonical variate analysis with applications to sputtering process
publisher AIDIC Servizi S.r.l.
series Chemical Engineering Transactions
issn 2283-9216
publishDate 2011-04-01
description Abstract preview not available - see full-text PDF article.
url https://www.cetjournal.it/index.php/cet/article/view/7735
work_keys_str_mv AT thpan avirtualmetrologymodelbasedonrecursivecanonicalvariateanalysiswithapplicationstosputteringprocess
AT dshwong avirtualmetrologymodelbasedonrecursivecanonicalvariateanalysiswithapplicationstosputteringprocess
AT ssjang avirtualmetrologymodelbasedonrecursivecanonicalvariateanalysiswithapplicationstosputteringprocess
AT thpan virtualmetrologymodelbasedonrecursivecanonicalvariateanalysiswithapplicationstosputteringprocess
AT dshwong virtualmetrologymodelbasedonrecursivecanonicalvariateanalysiswithapplicationstosputteringprocess
AT ssjang virtualmetrologymodelbasedonrecursivecanonicalvariateanalysiswithapplicationstosputteringprocess
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