A Virtual Metrology Model Based on Recursive Canonical Variate Analysis with Applications to Sputtering Process
Abstract preview not available - see full-text PDF article.
Main Authors: | T.H. Pan, D.S.H. Wong, S.S. Jang |
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Format: | Article |
Language: | English |
Published: |
AIDIC Servizi S.r.l.
2011-04-01
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Series: | Chemical Engineering Transactions |
Online Access: | https://www.cetjournal.it/index.php/cet/article/view/7735 |
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