A Low-Cost and High-Wavelength-Precision Fabrication Method for Multiwavelength DFB Semiconductor Laser Array
A new method to fabricate the multiwavelength DFB semiconductor laser array (MLA) is proposed for the first time based on sampled grating and s-bent waveguide. According to the detailed precision analysis, the lasing wavelength accuracy of the proposed structure is significantly improved. Because th...
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doaj-e8321ace501a49619d8cfc28d680ea072021-03-29T17:18:40ZengIEEEIEEE Photonics Journal1943-06552014-01-016311210.1109/JPHOT.2014.23176746798654A Low-Cost and High-Wavelength-Precision Fabrication Method for Multiwavelength DFB Semiconductor Laser ArrayYuechun Shi0Rui Liu1Shengchun Liu2Xiaojun Zhu3<formula formulatype="inline"><tex Notation="TeX">$^{1}$</tex></formula> National Laboratory of Solid State Microstructures, Microwave-Photonics Technology Laboratory, College of Engineering and Applied Sciences, Nanjing University, Nanjing, ChinaNational Laboratory of Solid State Microstructures, Microwave-Photonics Technology Laboratory, College of Engineering and Applied Sciences, Nanjing University, Nanjing, China<formula formulatype="inline"><tex Notation="TeX">$^{1}$</tex></formula>National Laboratory of Solid State Microstructures, Microwave-Photonics Technology Laboratory, College of Engineering, and Applied Sciences, Nanjing University, Nanjing, China<formula formulatype="inline"><tex Notation="TeX">$^{3}$</tex></formula>The School of Electronic and Information, Nantong University, Nantong, ChinaA new method to fabricate the multiwavelength DFB semiconductor laser array (MLA) is proposed for the first time based on sampled grating and s-bent waveguide. According to the detailed precision analysis, the lasing wavelength accuracy of the proposed structure is significantly improved. Because the common holography exposure and micrometer photolithography are used to fabricate the sampled grating and the bent waveguide in this method, the fabrication cost is very low. Therefore, it offers a suitable method for massive fabrication.https://ieeexplore.ieee.org/document/6798654/Sampled gratingbent waveguideDFB laserlaser array |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
Yuechun Shi Rui Liu Shengchun Liu Xiaojun Zhu |
spellingShingle |
Yuechun Shi Rui Liu Shengchun Liu Xiaojun Zhu A Low-Cost and High-Wavelength-Precision Fabrication Method for Multiwavelength DFB Semiconductor Laser Array IEEE Photonics Journal Sampled grating bent waveguide DFB laser laser array |
author_facet |
Yuechun Shi Rui Liu Shengchun Liu Xiaojun Zhu |
author_sort |
Yuechun Shi |
title |
A Low-Cost and High-Wavelength-Precision Fabrication Method for Multiwavelength DFB Semiconductor Laser Array |
title_short |
A Low-Cost and High-Wavelength-Precision Fabrication Method for Multiwavelength DFB Semiconductor Laser Array |
title_full |
A Low-Cost and High-Wavelength-Precision Fabrication Method for Multiwavelength DFB Semiconductor Laser Array |
title_fullStr |
A Low-Cost and High-Wavelength-Precision Fabrication Method for Multiwavelength DFB Semiconductor Laser Array |
title_full_unstemmed |
A Low-Cost and High-Wavelength-Precision Fabrication Method for Multiwavelength DFB Semiconductor Laser Array |
title_sort |
low-cost and high-wavelength-precision fabrication method for multiwavelength dfb semiconductor laser array |
publisher |
IEEE |
series |
IEEE Photonics Journal |
issn |
1943-0655 |
publishDate |
2014-01-01 |
description |
A new method to fabricate the multiwavelength DFB semiconductor laser array (MLA) is proposed for the first time based on sampled grating and s-bent waveguide. According to the detailed precision analysis, the lasing wavelength accuracy of the proposed structure is significantly improved. Because the common holography exposure and micrometer photolithography are used to fabricate the sampled grating and the bent waveguide in this method, the fabrication cost is very low. Therefore, it offers a suitable method for massive fabrication. |
topic |
Sampled grating bent waveguide DFB laser laser array |
url |
https://ieeexplore.ieee.org/document/6798654/ |
work_keys_str_mv |
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_version_ |
1724198015689818112 |