Contrast Enhancement for Topographic Imaging in Confocal Laser Scanning Microscopy
The influence of the axial pinhole position in a confocal microscope in terms of the contrast of the image is analyzed. The pinhole displacement method is introduced which allows to increase the contrast for topographic imaging. To demonstrate this approach, the simulated data of a confocal setup as...
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Online Access: | https://www.mdpi.com/2076-3417/9/15/3086 |
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doaj-ebb16291ffb84dda993d25daccbee83a2020-11-25T02:30:05ZengMDPI AGApplied Sciences2076-34172019-07-01915308610.3390/app9153086app9153086Contrast Enhancement for Topographic Imaging in Confocal Laser Scanning MicroscopyLena Schnitzler0Markus Finkeldey1Martin R. Hofmann2Nils C. Gerhardt3Photonics and Terahertz Technology, Ruhr University Bochum, 44780 Bochum, GermanyPhotonics and Terahertz Technology, Ruhr University Bochum, 44780 Bochum, GermanyPhotonics and Terahertz Technology, Ruhr University Bochum, 44780 Bochum, GermanyPhotonics and Terahertz Technology, Ruhr University Bochum, 44780 Bochum, GermanyThe influence of the axial pinhole position in a confocal microscope in terms of the contrast of the image is analyzed. The pinhole displacement method is introduced which allows to increase the contrast for topographic imaging. To demonstrate this approach, the simulated data of a confocal setup as well as experimental data is shown. The simulated data is verified experimentally by a custom stage scanning reflective microscopy setup using a semiconductor test target with low contrast structures of sizes between 200 nm and 500 nm. With the introduced technique, we are able to achieve a contrast enhancement of up to 80% without loosing diffraction limited resolution. We do not add additional components to the setup, thus our concept is applicable for all types of confocal microscopes. Furthermore, we show the application of the contrast enhancement in imaging integrated circuits.https://www.mdpi.com/2076-3417/9/15/3086microscopyconfocal microscopycontrast enhancement |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
Lena Schnitzler Markus Finkeldey Martin R. Hofmann Nils C. Gerhardt |
spellingShingle |
Lena Schnitzler Markus Finkeldey Martin R. Hofmann Nils C. Gerhardt Contrast Enhancement for Topographic Imaging in Confocal Laser Scanning Microscopy Applied Sciences microscopy confocal microscopy contrast enhancement |
author_facet |
Lena Schnitzler Markus Finkeldey Martin R. Hofmann Nils C. Gerhardt |
author_sort |
Lena Schnitzler |
title |
Contrast Enhancement for Topographic Imaging in Confocal Laser Scanning Microscopy |
title_short |
Contrast Enhancement for Topographic Imaging in Confocal Laser Scanning Microscopy |
title_full |
Contrast Enhancement for Topographic Imaging in Confocal Laser Scanning Microscopy |
title_fullStr |
Contrast Enhancement for Topographic Imaging in Confocal Laser Scanning Microscopy |
title_full_unstemmed |
Contrast Enhancement for Topographic Imaging in Confocal Laser Scanning Microscopy |
title_sort |
contrast enhancement for topographic imaging in confocal laser scanning microscopy |
publisher |
MDPI AG |
series |
Applied Sciences |
issn |
2076-3417 |
publishDate |
2019-07-01 |
description |
The influence of the axial pinhole position in a confocal microscope in terms of the contrast of the image is analyzed. The pinhole displacement method is introduced which allows to increase the contrast for topographic imaging. To demonstrate this approach, the simulated data of a confocal setup as well as experimental data is shown. The simulated data is verified experimentally by a custom stage scanning reflective microscopy setup using a semiconductor test target with low contrast structures of sizes between 200 nm and 500 nm. With the introduced technique, we are able to achieve a contrast enhancement of up to 80% without loosing diffraction limited resolution. We do not add additional components to the setup, thus our concept is applicable for all types of confocal microscopes. Furthermore, we show the application of the contrast enhancement in imaging integrated circuits. |
topic |
microscopy confocal microscopy contrast enhancement |
url |
https://www.mdpi.com/2076-3417/9/15/3086 |
work_keys_str_mv |
AT lenaschnitzler contrastenhancementfortopographicimaginginconfocallaserscanningmicroscopy AT markusfinkeldey contrastenhancementfortopographicimaginginconfocallaserscanningmicroscopy AT martinrhofmann contrastenhancementfortopographicimaginginconfocallaserscanningmicroscopy AT nilscgerhardt contrastenhancementfortopographicimaginginconfocallaserscanningmicroscopy |
_version_ |
1724830042354089984 |