Novel EMD-Based Extraction Approach of Electric Field Fringe Impacts on a Micro Capacitive Displacement Sensor
This paper presents an EMD (empirical mode decomposition)-based extraction approach to decouple the electric field fringe component impacts on the nonlinearity errors of a micro encoder-like capacitive displacement sensor. A calculated capacitance model built under Maxwell’s equations agai...
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doaj-ee261a848db847fdaa351037273fd9be2020-11-24T22:56:48ZengMDPI AGMicromachines2072-666X2018-05-019521110.3390/mi9050211mi9050211Novel EMD-Based Extraction Approach of Electric Field Fringe Impacts on a Micro Capacitive Displacement SensorJian-Ping Yu0Hui-Lin Du1Xin Li2Key Laboratory of Air-driven Equipment Technology of Zhejiang Province, Quzhou University, Quzhou 324000, ChinaKey Laboratory of Air-driven Equipment Technology of Zhejiang Province, Quzhou University, Quzhou 324000, ChinaCollege of Mechanical Engineering, Quzhou University, Quzhou 324000, ChinaThis paper presents an EMD (empirical mode decomposition)-based extraction approach to decouple the electric field fringe component impacts on the nonlinearity errors of a micro encoder-like capacitive displacement sensor. A calculated capacitance model built under Maxwell’s equations against the impacts of electric field fringe component indicates that signals of this sensor are all in periodic co-sinusoidal waveforms. Applying the proposed EMD scheme, signals are decomposed into sets of intrinsic mode functions (IMFs) and a residual, in which a fundamental component represents all the features of sensor signal and reserves the local information. Interpreting sensor information from the extracted component instead of the original signal drastically diminishes the impacts of electric field fringe effect. Results from a test bench shows that after applying the EMD-based extraction approach, waveform errors were decreased from over 4.18% to less than 0.89%. Nonlinearity of the interpreted displacement was decreased from 1.54% to 0.29% for 8 mm stroke.http://www.mdpi.com/2072-666X/9/5/211capacitive micro sensorfringe effectco-sinusoidal errorempirical mode decomposition (EMD) |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
Jian-Ping Yu Hui-Lin Du Xin Li |
spellingShingle |
Jian-Ping Yu Hui-Lin Du Xin Li Novel EMD-Based Extraction Approach of Electric Field Fringe Impacts on a Micro Capacitive Displacement Sensor Micromachines capacitive micro sensor fringe effect co-sinusoidal error empirical mode decomposition (EMD) |
author_facet |
Jian-Ping Yu Hui-Lin Du Xin Li |
author_sort |
Jian-Ping Yu |
title |
Novel EMD-Based Extraction Approach of Electric Field Fringe Impacts on a Micro Capacitive Displacement Sensor |
title_short |
Novel EMD-Based Extraction Approach of Electric Field Fringe Impacts on a Micro Capacitive Displacement Sensor |
title_full |
Novel EMD-Based Extraction Approach of Electric Field Fringe Impacts on a Micro Capacitive Displacement Sensor |
title_fullStr |
Novel EMD-Based Extraction Approach of Electric Field Fringe Impacts on a Micro Capacitive Displacement Sensor |
title_full_unstemmed |
Novel EMD-Based Extraction Approach of Electric Field Fringe Impacts on a Micro Capacitive Displacement Sensor |
title_sort |
novel emd-based extraction approach of electric field fringe impacts on a micro capacitive displacement sensor |
publisher |
MDPI AG |
series |
Micromachines |
issn |
2072-666X |
publishDate |
2018-05-01 |
description |
This paper presents an EMD (empirical mode decomposition)-based extraction approach to decouple the electric field fringe component impacts on the nonlinearity errors of a micro encoder-like capacitive displacement sensor. A calculated capacitance model built under Maxwell’s equations against the impacts of electric field fringe component indicates that signals of this sensor are all in periodic co-sinusoidal waveforms. Applying the proposed EMD scheme, signals are decomposed into sets of intrinsic mode functions (IMFs) and a residual, in which a fundamental component represents all the features of sensor signal and reserves the local information. Interpreting sensor information from the extracted component instead of the original signal drastically diminishes the impacts of electric field fringe effect. Results from a test bench shows that after applying the EMD-based extraction approach, waveform errors were decreased from over 4.18% to less than 0.89%. Nonlinearity of the interpreted displacement was decreased from 1.54% to 0.29% for 8 mm stroke. |
topic |
capacitive micro sensor fringe effect co-sinusoidal error empirical mode decomposition (EMD) |
url |
http://www.mdpi.com/2072-666X/9/5/211 |
work_keys_str_mv |
AT jianpingyu novelemdbasedextractionapproachofelectricfieldfringeimpactsonamicrocapacitivedisplacementsensor AT huilindu novelemdbasedextractionapproachofelectricfieldfringeimpactsonamicrocapacitivedisplacementsensor AT xinli novelemdbasedextractionapproachofelectricfieldfringeimpactsonamicrocapacitivedisplacementsensor |
_version_ |
1725653302141517824 |