Dislocation Energetics and Pop-Ins in AlN Thin Films by Berkovich Nanoindentation

Dislocation Energetics and Pop-Ins in AlN Thin Films by Berkovich Nanoindentation

Nanoindentation-induced multiple pop-ins were observed in the load-displacement curves when the mechanical responses of AlN films grown on c-plane sapphire substrates were investigated by using Berkovich indenters. No evidence of phase transformation is revealed by cross-sectional transmission elect...

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Bibliographic Details
Main Authors: Jenh-Yih Juang, Yu-Chin Tseng, Sheng-Rui Jian, I-Ju Teng
Format: Article
Language:English
Published: MDPI AG 2013-09-01
Series:Materials
Subjects:
nanoindentation
pop-ins
AlN thin films
transmission electron microscopy
Online Access:http://www.mdpi.com/1996-1944/6/9/4259

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