Real-time observation of rotational twin formation during molecular-beam epitaxial growth of GaAs on Si (111) by x-ray diffraction

The formation and evolution of rotational twin (TW) domains introduced by a stacking fault during molecular-beam epitaxial growth of GaAs on Si (111) substrates were studied by in situ x-ray diffraction. To modify the volume ratio of TW to total GaAs domains, GaAs was deposited under high and low gr...

Full description

Bibliographic Details
Main Authors: Hidetoshi Suzuki, Yuka Nakata, Masamitu Takahasi, Kazuma Ikeda, Yoshio Ohshita, Osamu Morohara, Hirotaka Geka, Yoshitaka Moriyasu
Format: Article
Language:English
Published: AIP Publishing LLC 2016-03-01
Series:AIP Advances
Online Access:http://dx.doi.org/10.1063/1.4943511
id doaj-efc7f18ef0514e1098b7c7ec08caedcc
record_format Article
spelling doaj-efc7f18ef0514e1098b7c7ec08caedcc2020-11-24T22:39:55ZengAIP Publishing LLCAIP Advances2158-32262016-03-0163035303035303-610.1063/1.4943511012603ADVReal-time observation of rotational twin formation during molecular-beam epitaxial growth of GaAs on Si (111) by x-ray diffractionHidetoshi Suzuki0Yuka Nakata1Masamitu Takahasi2Kazuma Ikeda3Yoshio Ohshita4Osamu Morohara5Hirotaka Geka6Yoshitaka Moriyasu7Faculty of Engineering, University of Miyazaki, 1-1 Gakuen-Kibanadai-Nishi, Miyazaki 889-2192, JapanGraduate School of Materials Science, University of Hyogo, 3-2-1 Koto, Kamigori-cho, Hyogo 678-1297, JapanGraduate School of Materials Science, University of Hyogo, 3-2-1 Koto, Kamigori-cho, Hyogo 678-1297, JapanToyota Technological Institute, 2-12-1 Hisakata, Tempaku, Nagoya 468-8511, JapanAdvanced Devices and Sensor Systems Development Center, Asahi Kasei Co. Ltd., 2-1 Samejima, Fuji 416-8501, JapanAdvanced Devices and Sensor Systems Development Center, Asahi Kasei Co. Ltd., 2-1 Samejima, Fuji 416-8501, JapanAdvanced Devices and Sensor Systems Development Center, Asahi Kasei Co. Ltd., 2-1 Samejima, Fuji 416-8501, JapanAdvanced Devices and Sensor Systems Development Center, Asahi Kasei Co. Ltd., 2-1 Samejima, Fuji 416-8501, JapanThe formation and evolution of rotational twin (TW) domains introduced by a stacking fault during molecular-beam epitaxial growth of GaAs on Si (111) substrates were studied by in situ x-ray diffraction. To modify the volume ratio of TW to total GaAs domains, GaAs was deposited under high and low group V/group III (V/III) flux ratios. For low V/III, there was less nucleation of TW than normal growth (NG) domains, although the NG and TW growth rates were similar. For high V/III, the NG and TW growth rates varied until a few GaAs monolayers were deposited; the mean TW domain size was smaller for all film thicknesses.http://dx.doi.org/10.1063/1.4943511
collection DOAJ
language English
format Article
sources DOAJ
author Hidetoshi Suzuki
Yuka Nakata
Masamitu Takahasi
Kazuma Ikeda
Yoshio Ohshita
Osamu Morohara
Hirotaka Geka
Yoshitaka Moriyasu
spellingShingle Hidetoshi Suzuki
Yuka Nakata
Masamitu Takahasi
Kazuma Ikeda
Yoshio Ohshita
Osamu Morohara
Hirotaka Geka
Yoshitaka Moriyasu
Real-time observation of rotational twin formation during molecular-beam epitaxial growth of GaAs on Si (111) by x-ray diffraction
AIP Advances
author_facet Hidetoshi Suzuki
Yuka Nakata
Masamitu Takahasi
Kazuma Ikeda
Yoshio Ohshita
Osamu Morohara
Hirotaka Geka
Yoshitaka Moriyasu
author_sort Hidetoshi Suzuki
title Real-time observation of rotational twin formation during molecular-beam epitaxial growth of GaAs on Si (111) by x-ray diffraction
title_short Real-time observation of rotational twin formation during molecular-beam epitaxial growth of GaAs on Si (111) by x-ray diffraction
title_full Real-time observation of rotational twin formation during molecular-beam epitaxial growth of GaAs on Si (111) by x-ray diffraction
title_fullStr Real-time observation of rotational twin formation during molecular-beam epitaxial growth of GaAs on Si (111) by x-ray diffraction
title_full_unstemmed Real-time observation of rotational twin formation during molecular-beam epitaxial growth of GaAs on Si (111) by x-ray diffraction
title_sort real-time observation of rotational twin formation during molecular-beam epitaxial growth of gaas on si (111) by x-ray diffraction
publisher AIP Publishing LLC
series AIP Advances
issn 2158-3226
publishDate 2016-03-01
description The formation and evolution of rotational twin (TW) domains introduced by a stacking fault during molecular-beam epitaxial growth of GaAs on Si (111) substrates were studied by in situ x-ray diffraction. To modify the volume ratio of TW to total GaAs domains, GaAs was deposited under high and low group V/group III (V/III) flux ratios. For low V/III, there was less nucleation of TW than normal growth (NG) domains, although the NG and TW growth rates were similar. For high V/III, the NG and TW growth rates varied until a few GaAs monolayers were deposited; the mean TW domain size was smaller for all film thicknesses.
url http://dx.doi.org/10.1063/1.4943511
work_keys_str_mv AT hidetoshisuzuki realtimeobservationofrotationaltwinformationduringmolecularbeamepitaxialgrowthofgaasonsi111byxraydiffraction
AT yukanakata realtimeobservationofrotationaltwinformationduringmolecularbeamepitaxialgrowthofgaasonsi111byxraydiffraction
AT masamitutakahasi realtimeobservationofrotationaltwinformationduringmolecularbeamepitaxialgrowthofgaasonsi111byxraydiffraction
AT kazumaikeda realtimeobservationofrotationaltwinformationduringmolecularbeamepitaxialgrowthofgaasonsi111byxraydiffraction
AT yoshioohshita realtimeobservationofrotationaltwinformationduringmolecularbeamepitaxialgrowthofgaasonsi111byxraydiffraction
AT osamumorohara realtimeobservationofrotationaltwinformationduringmolecularbeamepitaxialgrowthofgaasonsi111byxraydiffraction
AT hirotakageka realtimeobservationofrotationaltwinformationduringmolecularbeamepitaxialgrowthofgaasonsi111byxraydiffraction
AT yoshitakamoriyasu realtimeobservationofrotationaltwinformationduringmolecularbeamepitaxialgrowthofgaasonsi111byxraydiffraction
_version_ 1725706897535795200