Frequency Modulated Magnetometer Using a Double-Ended Tuning Fork Resonator

Frequency Modulated Magnetometer Using a Double-Ended Tuning Fork Resonator

A Lorentz force MEMS magnetometer based on a double-ended tuning fork (DETF) for out-of-plane sensing is presented here. A novel configuration using a hexagonal-shaped Lorentz force transducer is used, which simplifies the sensor configuration and improves its sensitivity. Frequency modulated device...

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Bibliographic Details
Main Authors: Eurico Esteves Moreira, João Gaspar, Luis Alexandre Rocha
Format: Article
Language:English
Published: MDPI AG 2018-11-01
Series:Proceedings
Subjects:
MEMS
magnetometer
frequency modulated
Lorentz force
Online Access:https://www.mdpi.com/2504-3900/2/13/1028
id doaj-f2783ea3b34d4deb8dcbfc254cfa2d71
record_format Article
spelling doaj-f2783ea3b34d4deb8dcbfc254cfa2d712020-11-24T22:52:09ZengMDPI AGProceedings2504-39002018-11-01213102810.3390/proceedings2131028proceedings2131028Frequency Modulated Magnetometer Using a Double-Ended Tuning Fork ResonatorEurico Esteves Moreira0João Gaspar1Luis Alexandre Rocha2CMEMS-UM, University of Minho, 4800-058 Guimarães, PortugalMeN, International and Iberian Nanotechnology Laboratory (INL), 4717-330 Braga, PortugalCMEMS-UM, University of Minho, 4800-058 Guimarães, PortugalA Lorentz force MEMS magnetometer based on a double-ended tuning fork (DETF) for out-of-plane sensing is presented here. A novel configuration using a hexagonal-shaped Lorentz force transducer is used, which simplifies the sensor configuration and improves its sensitivity. Frequency modulated devices were fabricated in an in-house process on silicon on insulator wafers (SOI) and then tested in vacuum. The final devices have a differential configuration and experimental characterization shows a sensitivity of 4.59 Hz/mT for a total input current (on the Lorentz bar) of 1.5 mA.https://www.mdpi.com/2504-3900/2/13/1028MEMSmagnetometerfrequency modulatedLorentz force
collection DOAJ
language English
format Article
sources DOAJ
author Eurico Esteves Moreira
João Gaspar
Luis Alexandre Rocha
spellingShingle Eurico Esteves Moreira
João Gaspar
Luis Alexandre Rocha
Frequency Modulated Magnetometer Using a Double-Ended Tuning Fork Resonator
Proceedings
MEMS
magnetometer
frequency modulated
Lorentz force
author_facet Eurico Esteves Moreira
João Gaspar
Luis Alexandre Rocha
author_sort Eurico Esteves Moreira
title Frequency Modulated Magnetometer Using a Double-Ended Tuning Fork Resonator
title_short Frequency Modulated Magnetometer Using a Double-Ended Tuning Fork Resonator
title_full Frequency Modulated Magnetometer Using a Double-Ended Tuning Fork Resonator
title_fullStr Frequency Modulated Magnetometer Using a Double-Ended Tuning Fork Resonator
title_full_unstemmed Frequency Modulated Magnetometer Using a Double-Ended Tuning Fork Resonator
title_sort frequency modulated magnetometer using a double-ended tuning fork resonator
publisher MDPI AG
series Proceedings
issn 2504-3900
publishDate 2018-11-01
description A Lorentz force MEMS magnetometer based on a double-ended tuning fork (DETF) for out-of-plane sensing is presented here. A novel configuration using a hexagonal-shaped Lorentz force transducer is used, which simplifies the sensor configuration and improves its sensitivity. Frequency modulated devices were fabricated in an in-house process on silicon on insulator wafers (SOI) and then tested in vacuum. The final devices have a differential configuration and experimental characterization shows a sensitivity of 4.59 Hz/mT for a total input current (on the Lorentz bar) of 1.5 mA.
topic MEMS
magnetometer
frequency modulated
Lorentz force
url https://www.mdpi.com/2504-3900/2/13/1028
work_keys_str_mv AT euricoestevesmoreira frequencymodulatedmagnetometerusingadoubleendedtuningforkresonator
AT joaogaspar frequencymodulatedmagnetometerusingadoubleendedtuningforkresonator
AT luisalexandrerocha frequencymodulatedmagnetometerusingadoubleendedtuningforkresonator
_version_ 1725666939214233600

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