Selection of technologies for metal film application using physical deposition techniques
Introduction. Obtaining high-quality thin metal films is important for advances in the technologies of applying antifriction and wear-resistant coatings on cutting tools or parts of friction couples. Various techniques of physical film deposition are applied using technologies of cathode (ion), magn...
Main Author: | S. P. Glushko |
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Format: | Article |
Language: | Russian |
Published: |
Don State Technical University
2020-10-01
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Series: | Advanced Engineering Research |
Subjects: | |
Online Access: | https://www.vestnik-donstu.ru/jour/article/view/1693 |
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