Optical Properties of GaAs Quantum Dots Fabricated by Filling of Self-Assembled Nanoholes
<p>Abstract</p> <p>Experimental results of the local droplet etching technique for the self-assembled formation of nanoholes and quantum rings on semiconductor surfaces are discussed. Dependent on the sample design and the process parameters, filling of nanoholes in AlGaAs generate...
Main Authors: | , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
SpringerOpen
2009-01-01
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Series: | Nanoscale Research Letters |
Subjects: | |
Online Access: | http://dx.doi.org/10.1007/s11671-009-9507-3 |
Summary: | <p>Abstract</p> <p>Experimental results of the local droplet etching technique for the self-assembled formation of nanoholes and quantum rings on semiconductor surfaces are discussed. Dependent on the sample design and the process parameters, filling of nanoholes in AlGaAs generates strain-free GaAs quantum dots with either broadband optical emission or sharp photoluminescence (PL) lines. Broadband emission is found for samples with completely filled flat holes, which have a very broad depth distribution. On the other hand, partly filling of deep holes yield highly uniform quantum dots with very sharp PL lines.</p> |
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ISSN: | 1931-7573 1556-276X |