An Isotropic Areal Filter Based on High-Order Thin-Plate Spline for Surface Metrology

An Isotropic Areal Filter Based on High-Order Thin-Plate Spline for Surface Metrology

Isotropy, end effect suppression, calculation efficiency and robustness are basic requirements of areal filters for surface metrology. However, current areal filters cause problems in different aspects, which cripples the operation of surface metrology like roughness evaluation. In this paper, a hig...

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Bibliographic Details
Main Authors: Suichu Huang, Mingsi Tong, Wentao Huang, Xuezeng Zhao
Format: Article
Language:English
Published: IEEE 2019-01-01
Series:IEEE Access
Subjects:
Areal spline filter
isotropy
high-order thin-plate spline
end effect
surface metrology
Online Access:https://ieeexplore.ieee.org/document/8794800/

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