Modal-Decomposition-Dependent State-Space Modeling and Modal Analysis of a Rigid-Flexible, Coupled, Multifreedom Motion System: Theory and Experiment

In a multiple degrees of freedom motion system with rigid-flexible coupling, the flexible internal dynamics have a significant negative impact on performance because the degrees of freedom are coupled. Inspired by this problem, a multi-input multioutput state-space model based on modal coordinates i...

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Main Authors:	Qian Tang, Fuyu Guo, Tao Huang, Kaiming Yang, Yu Zhu, Min Li
Format:	Article
Language:	English
Published:	Hindawi Limited 2020-01-01
Series:	Shock and Vibration
Online Access:	http://dx.doi.org/10.1155/2020/8859222

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spelling	doaj-ff102b9fc0bf4c92b94c9e109b27dcea2020-11-25T03:18:58ZengHindawi LimitedShock and Vibration1070-96221875-92032020-01-01202010.1155/2020/88592228859222Modal-Decomposition-Dependent State-Space Modeling and Modal Analysis of a Rigid-Flexible, Coupled, Multifreedom Motion System: Theory and ExperimentQian Tang0Fuyu Guo1Tao Huang2Kaiming Yang3Yu Zhu4Min Li5State Key Laboratory of Mechanical Transmissions and the College of Mechanical Engineering, Chongqing University, Chongqing 400044, ChinaState Key Laboratory of Mechanical Transmissions and the College of Mechanical Engineering, Chongqing University, Chongqing 400044, ChinaState Key Laboratory of Mechanical Transmissions and the College of Mechanical Engineering, Chongqing University, Chongqing 400044, ChinaState Key Laboratory of Tribology, The Beijing Key Lab of Precision, Ultra-Precision Manufacture Equipment and Control and Department of Mechanical Engineering, Tsinghua University, Beijing 100084, ChinaState Key Laboratory of Tribology, The Beijing Key Lab of Precision, Ultra-Precision Manufacture Equipment and Control and Department of Mechanical Engineering, Tsinghua University, Beijing 100084, ChinaSchool of Mechanical Engineering and Electronic Information, China University of Geosciences, Wuhan 430074, ChinaIn a multiple degrees of freedom motion system with rigid-flexible coupling, the flexible internal dynamics have a significant negative impact on performance because the degrees of freedom are coupled. Inspired by this problem, a multi-input multioutput state-space model based on modal coordinates is proposed to decouple the rigid body and flexible modes. The closed-loop subspace identification method based on orthogonal is utilized to develop an unbiased standard state-space model. Based on the similarity principle, a modal analysis method is proposed to transfer the standard state-space model to the proposed modal-decomposition-dependent state-space model. Controllability and observability criteria are met to guarantee the minimum realization of the proposed state-space model. Finally, a modeling and modal analysis experiment is conducted on a developed wafer stage of lithographic tool. The results verify the effectiveness and accuracy of the proposed modeling method, as well as the controllability and observability of the proposed model.http://dx.doi.org/10.1155/2020/8859222
collection	DOAJ
language	English
format	Article
sources	DOAJ
author	Qian Tang Fuyu Guo Tao Huang Kaiming Yang Yu Zhu Min Li
spellingShingle	Qian Tang Fuyu Guo Tao Huang Kaiming Yang Yu Zhu Min Li Modal-Decomposition-Dependent State-Space Modeling and Modal Analysis of a Rigid-Flexible, Coupled, Multifreedom Motion System: Theory and Experiment Shock and Vibration
author_facet	Qian Tang Fuyu Guo Tao Huang Kaiming Yang Yu Zhu Min Li
author_sort	Qian Tang
title	Modal-Decomposition-Dependent State-Space Modeling and Modal Analysis of a Rigid-Flexible, Coupled, Multifreedom Motion System: Theory and Experiment
title_short	Modal-Decomposition-Dependent State-Space Modeling and Modal Analysis of a Rigid-Flexible, Coupled, Multifreedom Motion System: Theory and Experiment
title_full	Modal-Decomposition-Dependent State-Space Modeling and Modal Analysis of a Rigid-Flexible, Coupled, Multifreedom Motion System: Theory and Experiment
title_fullStr	Modal-Decomposition-Dependent State-Space Modeling and Modal Analysis of a Rigid-Flexible, Coupled, Multifreedom Motion System: Theory and Experiment
title_full_unstemmed	Modal-Decomposition-Dependent State-Space Modeling and Modal Analysis of a Rigid-Flexible, Coupled, Multifreedom Motion System: Theory and Experiment
title_sort	modal-decomposition-dependent state-space modeling and modal analysis of a rigid-flexible, coupled, multifreedom motion system: theory and experiment
publisher	Hindawi Limited
series	Shock and Vibration
issn	1070-9622 1875-9203
publishDate	2020-01-01
description	In a multiple degrees of freedom motion system with rigid-flexible coupling, the flexible internal dynamics have a significant negative impact on performance because the degrees of freedom are coupled. Inspired by this problem, a multi-input multioutput state-space model based on modal coordinates is proposed to decouple the rigid body and flexible modes. The closed-loop subspace identification method based on orthogonal is utilized to develop an unbiased standard state-space model. Based on the similarity principle, a modal analysis method is proposed to transfer the standard state-space model to the proposed modal-decomposition-dependent state-space model. Controllability and observability criteria are met to guarantee the minimum realization of the proposed state-space model. Finally, a modeling and modal analysis experiment is conducted on a developed wafer stage of lithographic tool. The results verify the effectiveness and accuracy of the proposed modeling method, as well as the controllability and observability of the proposed model.
url	http://dx.doi.org/10.1155/2020/8859222
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Modal-Decomposition-Dependent State-Space Modeling and Modal Analysis of a Rigid-Flexible, Coupled, Multifreedom Motion System: Theory and Experiment

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