Structural properties of zinc oxide thin films deposited on various substrates
In this work, the structural properties of radio frequency sputtering-grown zinc oxide (ZnO) thin films on sapphire (Al2O3), gallium arsenide (GaAs) and n-type silicon (Si) substrates were characterized. Scanning electron microscopy was employed to study the surface morphology of the samples. X-ray...
Main Authors: | C.G., Ching (Author), P.K., Ooi (Author), S.S., Ng (Author), Hassan, Z. (Author), Abu Hassan, H. (Author), Abdullah, M.J (Author) |
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Format: | Article |
Language: | English |
Published: |
Universiti Kebangsaan Malaysia,
2014-06.
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Online Access: | Get fulltext |
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