Structural and optical properties of nanocrystalline silicon thin films grown by 150MHz VHF-PECVD
Nanocrystalline silicon thin film is a promising material potentially used in the optoelectronic field due to its improved and unique properties. In this work, nanocrystalline silicon thin films were grown by using a 150MHz VHF-PECVD to study the effect of deposition times, substrate temperatures an...
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| Format: | Thesis |
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2012-04.
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| Online Access: | Get fulltext |