Structural and optical properties of nanocrystalline silicon thin films grown by 150MHz VHF-PECVD
Nanocrystalline silicon thin film is a promising material potentially used in the optoelectronic field due to its improved and unique properties. In this work, nanocrystalline silicon thin films were grown by using a 150MHz VHF-PECVD to study the effect of deposition times, substrate temperatures an...
Main Author: | Tarjudin, Nurul Aini (Author) |
---|---|
Format: | Thesis |
Published: |
2012-04.
|
Subjects: | |
Online Access: | Get fulltext |
Similar Items
-
Studies of the self-assembled growth mechanism on nanocrystalline silicon nanodots
by: Sakrani, Samsudi, et al.
Published: (2010) -
Optical properties measurements of nanocrystalline silicon thin films
by: Gan, Chee Hong
Published: (2011) -
Grown Low-Temperature Microcrystalline Silicon Thin Film by VHF PECVD for Thin Films Solar Cell
by: Shanglong Peng, et al.
Published: (2015-01-01) -
Hydrogenated Microcrystalline Silicon Thin Film Solar Cells Fabricated by VHF-PECVD
by: Wei-Che Hung, et al. -
Time dependence of morphological and optical properties of DC sputtering grown copper oxide thin film
by: Sulaiman, Rosmaizatul Akma
Published: (2014)